公开(公告)号：US12288710B2

公开(公告)日：2025-04-29

申请号：US17551586

申请日：2021-12-15

Applicant: ASM IP Holding B.V.

Inventor： Theodorus G. M. Oosterlaken ,  Aniket Nitin Patil ,  Nimit Kothari

IPC: H01L21/677

Abstract: The disclosure relates to a wafer processing apparatus for processing wafers with a rotatable table provided with a support constructed and arranged to support a removable holder for storing a plurality of wafers. A drive assembly may be provided to provide a rotary movement to the rotatable table around a vertical axis perpendicular to the table; and, a supply line may be constructed and arranged to supply utilities to the rotatable table. The drive assembly may be controlled and configured to create the rotary movement of the table in a clockwise and/or an anticlockwise direction to avoid breakage of the supply line.

公开(公告)号：US20230012302A1

公开(公告)日：2023-01-12

申请号：US17810748

申请日：2022-07-05

Applicant: ASM IP Holding B.V

Inventor： Theodorus G.M. Oosterlaken ,  Maarten Hendrikus Maria Lamers ,  Nimit Kothari ,  Chaggai Shmuel Ganani

IPC: H01L21/677

Abstract: Cassette lid opening device for a semiconductor substrate processing apparatus comprising a housing, a door assembly, a transport mechanism, and at least one suspension. The housing has at least one wall with an associated wall opening. The door assembly comprises at least one door plate configured for substantially closing off the associated wall opening of the at least one wall. The transport mechanism includes a carriage which is connected to the door assembly and configured to transport the door assembly parallel to the at least one wall. The at least one suspension is arranged between the at least one door plate and the transport mechanism. The at least one suspension comprises a suspension spring assembly which allows movement of the at least one door plate in a direction perpendicular to the at least one wall.

公开(公告)号：US20220199444A1

公开(公告)日：2022-06-23

申请号：US17551586

申请日：2021-12-15

Applicant: ASM IP Holding B.V.

Inventor： Theodorus G.M. Oosterlaken ,  Aniket Nitin Patil ,  Nimit Kothari

IPC: H01L21/677

Abstract: The disclosure relates to a wafer processing apparatus for processing wafers with a rotatable table provided with a support constructed and arranged to support a removable holder for storing a plurality of wafers. A drive assembly may be provided to provide a rotary movement to the rotatable table around a vertical axis perpendicular to the table; and, a supply line may be constructed and arranged to supply utilities to the rotatable table. The drive assembly may be controlled and configured to create the rotary movement of the table in a clockwise and/or an anticlockwise direction to avoid breakage of the supply line.

公开(公告)号：US20250132181A1

公开(公告)日：2025-04-24

申请号：US18915971

申请日：2024-10-15

Applicant: ASM IP Holding B.V.

Inventor： Theodorus G.M. Oosterlaken ,  Nimit Kothari ,  Marina de Jager

IPC: H01L21/677 ,  B25J11/00 ,  B25J15/06 ,  H01L21/673 ,  H01L21/683 ,  H01L21/687

Abstract: A semiconductor processing assembly is disclosed with: a wafer handling robot comprising a plurality of end effectors distributed in substantial vertical direction at an end effector pitch and configured to carry wafers; a wafer boat having boat slots distributed in substantial vertical direction and configured to hold wafers to be loaded at a load pitch; a wafer cassette having cassette slots distributed in substantial vertical direction at a cassette pitch and configured to hold wafers; and an electronic controller for controlling at least the wafer handling robot and having a system memory. By having the end effector pitch substantially equal to the cassette pitch, the electronic controller may be configured and programmed with a program in its system memory to control the semiconductor processing assembly to transfer wafers between the cassette slots of the wafer cassette and the boat slots of the wafer boat.

公开(公告)号：US12237195B2

公开(公告)日：2025-02-25

申请号：US17810748

申请日：2022-07-05

Applicant: ASM IP Holding B.V

Inventor： Theodorus G. M. Oosterlaken ,  Maarten Hendrikus Maria Lamers ,  Nimit Kothari ,  Chaggai Shmuel Ganani

IPC: H01L21/677

Abstract: Cassette lid opening device for a semiconductor substrate processing apparatus comprising a housing, a door assembly, a transport mechanism, and at least one suspension. The housing has at least one wall with an associated wall opening. The door assembly comprises at least one door plate configured for substantially closing off the associated wall opening of the at least one wall. The transport mechanism includes a carriage which is connected to the door assembly and configured to transport the door assembly parallel to the at least one wall. The at least one suspension is arranged between the at least one door plate and the transport mechanism. The at least one suspension comprises a suspension spring assembly which allows movement of the at least one door plate in a direction perpendicular to the at least one wall.