公开(公告)号：US20230143667A1

公开(公告)日：2023-05-11

申请号：US17980100

申请日：2022-11-03

Applicant: ASM IP Holding B.V.

Inventor： Gurupkar Nerwal ,  Senthil Sivaraman

IPC: H01L21/673 ,  H01L21/677 ,  H01L21/687 ,  H01L21/67

CPC classification number: H01L21/67323 ,  H01L21/67775 ,  H01L21/68707 ,  H01L21/67167

Abstract: A substrate storage rack for a semiconductor processing system includes a bottom plate, a top plate, and a column assembly. The top plate is spaced apart from the bottom plate, the column assembly connects the top plate to the bottom plate, and a ball member is compressively seated within the column assembly. The ball member protrudes from the column assembly in a direction toward the top plate to support a substrate within the substrate storage rack and on the ball member. Semiconductor processing systems and methods of making substrate storage racks are also described.