公开(公告)号：US20240178021A1

公开(公告)日：2024-05-30

申请号：US18522152

申请日：2023-11-28

Applicant: ASM IP Holding B.V.

Inventor： Senthil Sivaraman ,  Mandar Deshpande ,  Samer Banna

IPC: H01L21/67 ,  H01L21/677

CPC classification number: H01L21/67201 ,  H01L21/67098 ,  H01L21/6719 ,  H01L21/67742

Abstract: A load lock arrangement includes a load lock body having an upper plate member defining an upper accessory seat, an intermediate plate member spaced apart from the upper plate member and defining an intermediate accessory seat, and a lower plate member separated from the upper plate member by the intermediate plate member and defining a lower accessory seat. One of an upper heater and an upper accessory seat blanking plate is fixed to the upper accessory seat; one of an upper chill plate and an intermediate accessory seat blanking plate fixed to the intermediate accessory seat; and one of a lower chill plate, a lower heater, and a lower accessory seat blanking plate fixed to the lower accessory seat. Semiconductor processing systems, methods of making load lock arrangements, and material layer deposition methods are also described.

公开(公告)号：US20250006521A1

公开(公告)日：2025-01-02

申请号：US18755599

申请日：2024-06-26

Applicant: ASM IP Holding B.V.

Inventor： Senthil Sivaraman ,  Samer Banna ,  Senthil Arasu Subas Chandra Bose

IPC: H01L21/67

Abstract: Substrate processing systems have expanded substrate processing capabilities. In some examples, this may be accomplished by providing an inboard substrate handling chamber (e.g., with six facets or side walls) and an outboard substrate handling chamber (e.g., with five facets or side walls). The inboard substrate handling chamber may be connected with additional substrate processing chambers. The inboard substrate handling chamber may be connected to the outboard substrate handling chamber by an additional outboard load-lock module. These features enable a manufacturer to increase the number of substrate processing chambers in a substrate processing system or line.

公开(公告)号：US20250022729A1

公开(公告)日：2025-01-16

申请号：US18768897

申请日：2024-07-10

Applicant: ASM IP Holding B.V.

Inventor： Senthil Sivaraman ,  Yevgeniy Rabinovich

IPC: H01L21/67

Abstract: Lid moving systems and methods facilitate reliable and safe movement of lids for chambers. Such systems may include: (a) a base member; (b) side walls extending from the base member with each including a cam surface defined therein; (c) a lid mounting arm extending away from the base member; (d) a first pivotal connection system engaging the cam surfaces and pivotally engaging the lid mounting arm; (e) a traveler member including a recess or opening on a surface facing the base member; (f) a second pivotal connection system pivotally engaging the traveler member with the lid mounting arm; (g) a motor for moving the traveler member (causing movement of the lid mounting arm with respect to the side walls); and/or (h) a stopper mechanism extending into the recess or opening of the traveler member from a direction of the surface facing the base member when the lid is opened.

公开(公告)号：US20230143667A1

公开(公告)日：2023-05-11

申请号：US17980100

申请日：2022-11-03

Applicant: ASM IP Holding B.V.

Inventor： Gurupkar Nerwal ,  Senthil Sivaraman

IPC: H01L21/673 ,  H01L21/677 ,  H01L21/687 ,  H01L21/67

CPC classification number: H01L21/67323 ,  H01L21/67775 ,  H01L21/68707 ,  H01L21/67167

Abstract: A substrate storage rack for a semiconductor processing system includes a bottom plate, a top plate, and a column assembly. The top plate is spaced apart from the bottom plate, the column assembly connects the top plate to the bottom plate, and a ball member is compressively seated within the column assembly. The ball member protrudes from the column assembly in a direction toward the top plate to support a substrate within the substrate storage rack and on the ball member. Semiconductor processing systems and methods of making substrate storage racks are also described.