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公开(公告)号：US10691029B2
公开(公告)日：2020-06-23
申请号：US16305913
申请日：2017-06-01
Applicant: ASML NETHERLANDS B.V.
Inventor： Ning Gu , Daimian Wang , Jen-Shiang Wang
Abstract: A method including computing a multi-variable cost function, the multi-variable cost function representing a metric characterizing a degree of matching between a result when measuring a metrology target structure using a substrate measurement recipe and a behavior of a pattern of a functional device, the metric being a function of a plurality of design variables including a parameter of the metrology target structure, and adjusting the design variables and computing the cost function with the adjusted design variables, until a certain termination condition is satisfied.
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