公开(公告)号：US10551182B2

公开(公告)日：2020-02-04

申请号：US15769999

申请日：2016-10-25

Applicant: ASML NETHERLANDS B.V.

Inventor： Tiannan Guan ,  Joseph Eid Estafanous Zekry

IPC: G01B13/12 ,  G03F9/00 ,  G01L11/02

Abstract: A gas gauge proximity sensor comprising a measurement gas flow channel having an optical pressure sensor for comparing a pressure of the first gas flow and a reference pressure; the optical pressure sensor comprising a first optical cavity fluidly connected to the measurement channel and a second optical cavity fluidly connected to the reference pressure, with the optical cavities being configured to receive electromagnetic radiation and output reflected electromagnetic radiation, the optical pressure sensor further being configured to combine the reflected electromagnetic radiation from the first optical cavity with the reflected electromagnetic radiation from the second optical cavity and determine, based on the combined electromagnetic radiation, a pressure difference between the pressure of the first gas flow and the reference pressure and determine, based on the pressure difference, a distance between the measurement outlet and the measurement object.

公开(公告)号：US10192772B2

公开(公告)日：2019-01-29

申请号：US15766740

申请日：2016-09-08

Applicant: ASML NETHERLANDS B.V.

Inventor： Satish Achanta ,  Tiannan Guan ,  Raymond Wilhelmus Louis LaFarre ,  Ilya Malakhovsky ,  Bas Johannes Petrus Roset ,  Siegfried Alexander Tromp ,  Johannes Petrus Martinus Bernardus Vermeulen

IPC: G03F7/20 ,  H01L21/687 ,  H01L21/683 ,  G03F7/00

Abstract: A substrate table to support a substrate, the substrate table including a main body, burls extending from the main body and having first upper ends that define a support surface to support the substrate, and support pins having second upper ends. The support pins are movable between a retracted position and an extended position. The support pins are arranged to support the substrate in the extended position. The support pins are arranged to be switched to a first stiffness mode and a second stiffness mode. In the first stiffness mode, the support pins have a first stiffness in a direction parallel to the support surface. In the second stiffness mode, the support pins have a second stiffness in the direction parallel to the support surface. The first stiffness is different from the second stiffness.

公开(公告)号：US12189309B2

公开(公告)日：2025-01-07

申请号：US17781411

申请日：2020-11-02

Applicant: ASML Netherlands B.V.

Inventor： Ronald Van Der Wilk ,  Tiannan Guan

IPC: G03F7/00

Abstract: A clamp assembly is disclose, the clamp assembly comprising a clamp (50) configurable to clamp a support member (110) to a lower base surface (49) of the clamp by electrostatic adhesion, and an arrangement configurable to direct a gas to the lower base surface (49) of the clamp. The arrangement is configurable to humidify the gas by exposing the gas to a liquid. Also disclosed is a method of discharging a lower base surface of a clamp, The method comprises the steps of humidifying a gas by exposing the gas to a liquid, and directing the humidified gas to a lower base surface of the clamp.

公开(公告)号：US20230008915A1

公开(公告)日：2023-01-12

申请号：US17781411

申请日：2020-11-02

Applicant: ASML Netherlands B.V.

Inventor： Ronald Van Der Wilk ,  Tiannan Guan

IPC: G03F7/20

Abstract: A clamp assembly is disclose, the clamp assembly comprising a clamp (50) configurable to clamp a support member (110) to a lower base surface (49) of the clamp by electrostatic adhesion, and an arrangement configurable to direct a gas to the lower base surface (49) of the clamp. The arrangement is configurable to humidify the gas by exposing the gas to a liquid. Also disclosed is a method of discharging a lower base surface of a clamp, The method comprises the steps of humidifying a gas by exposing the gas to a liquid, and directing the humidified gas to a lower base surface of the clamp.

公开(公告)号：US10451981B2

公开(公告)日：2019-10-22

申请号：US16343425

申请日：2017-09-08

Applicant: ASML NETHERLANDS B.V.

Inventor： Tiannan Guan ,  Jingshi Li ,  Miao Yu

IPC: G03F7/20

Abstract: A method of measuring wear of a substrate holder that is configured to hold a production substrate, the method includes: clamping a measurement substrate to the substrate holder; and measuring strain in the measurement substrate to generate a measurement result. The measurement substrate may have a body having dimensions similar to that of the production substrate; and a strain sensor in the body configured to measure strain in a peripheral portion of the measurement substrate.