公开(公告)号：US20210318624A1

公开(公告)日：2021-10-14

申请号：US17267708

申请日：2019-07-15

Applicant: ASML Netherlands B.V.

Inventor： Bas JANSEN ,  Hans BUTLER ,  Alexander Pascal DIJKSHOORN

IPC: G03F7/20 ,  H02N2/02 ,  H02N2/06 ,  H01L41/09

Abstract: The invention provides a substrate support arranged to support a substrate, comprising piezo a actuator, further comprising a first pair of electrodes, a second pair of electrodes and a piezo material having a first surface and a second surface. The first surface is arranged along a first direction and second direction. The first pair of electrodes comprises a first electrode arranged on the first surface and a second electrode arranged on the second surface. The second pair of electrodes is arranged to shear the piezo material. The first pair of electrodes is arranged to elongate the piezo material in a third direction perpendicular to the first direction and second direction. The first electrode is divided into at least two parts and is arranged to rotate the first surface and the second surface relatively to each other about the first direction wherein the piezo actuator is arranged to support the substrate.