公开(公告)号：US12080513B2

公开(公告)日：2024-09-03

申请号：US17633176

申请日：2020-08-08

Applicant: ASML Netherlands B.V.

Inventor： Wei Fang ,  Lingling Pu ,  Bo Wang ,  Zhonghua Dong ,  Yongxin Wang

IPC: H01J37/22 ,  G01N23/2251 ,  G06T5/50 ,  G06T5/77 ,  G06T5/80 ,  H01J37/24 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/222 ,  G01N23/2251 ,  G06T5/50 ,  G06T5/77 ,  G06T5/80 ,  H01J37/244 ,  H01J37/28 ,  G01N2223/07 ,  G01N2223/401 ,  G01N2223/418 ,  G01N2223/507 ,  G06T2207/10061 ,  G06T2207/20081 ,  H01J2237/2448 ,  H01J2237/2806 ,  H01J2237/2809 ,  H01J2237/2817

Abstract: An improved apparatus and method for enhancing an image, and more particularly an apparatus and method for enhancing an image through cross-talk cancellation in a multiple charged-particle beam inspection are disclosed. An improved method for enhancing an image includes acquiring a first image signal of a plurality of image signals from a detector of a multi-beam inspection system. The first image signal corresponds to a detected signal from a first region of the detector on which electrons of a first secondary electron beam and of a second secondary electron beam are incident. The method includes reducing, from the first image signal, cross-talk contamination originating from the second secondary electron beam using a relationship between the first image signal and beam intensities associated with the first secondary electron beam and the second secondary electron beam. The method further includes generating a first image corresponding to first secondary electron beam after reduction.

公开(公告)号：US11694312B2

公开(公告)日：2023-07-04

申请号：US17308835

申请日：2021-05-05

Applicant: ASML Netherlands B.V.

Inventor： Wei Fang ,  Ruochong Fei ,  Lingling Pu ,  Wentian Zhou ,  Liangjiang Yu ,  Bo Wang

IPC: G06T5/00 ,  G06T7/10 ,  G06T5/50

CPC classification number: G06T5/003 ,  G06T5/50 ,  G06T7/10 ,  G06T2207/10061 ,  G06T2207/20201 ,  G06T2207/30148

Abstract: An improved method and apparatus for enhancing an inspection image in a charged-particle beam inspection system. An improved method for enhancing an inspection image comprises acquiring a first image and a second image of multiple stacked layers of a sample that are taken with a first focal point and a second focal point, respectively, associating a first segment of the first image with a first layer among the multiple stacked layers and associating a second segment of the second image with a second layer among the multiple stacked layers, updating the first segment based on a first reference image corresponding to the first layer and updating the second segment based on a second reference image corresponding to the second layer, and combining the updated first segment and the updated second segment to generate a combined image including the first layer and the second layer.