公开(公告)号：US20190155177A1

公开(公告)日：2019-05-23

申请号：US16257578

申请日：2019-01-25

Applicant: ASML Netherlands B.V.

Inventor： David Bessems ,  Jon David Tedrow ,  Colin Michael Odneal

IPC: G03F7/20

Abstract: A vessel having a seal that is protected from the liquid material within the vessel by a volume of gas. The vessel has a partition that divides the vessel into two volume spaces such that the seal that is in gaseous communication with the first volume space is protected from the liquid material in the second volume space by a volume of gas in the first volume space.

公开(公告)号：US20190086817A1

公开(公告)日：2019-03-21

申请号：US15711678

申请日：2017-09-21

Applicant: ASML, Netherlands B.V.

Inventor： David Bessems ,  Jon David Tedrow ,  Colin Michael Odneal

IPC: G03F7/20

CPC classification number: G03F7/70841 ,  G03F7/70033 ,  H05G2/005 ,  H05G2/006

Abstract: A vessel having a seal that is protected from the liquid material within the vessel by a volume of gas. The vessel has a partition that divides the vessel into two volume spaces such that the seal that is in gaseous communication with the first volume space is protected from the liquid material in the second volume space by a volume of gas in the first volume space.

公开(公告)号：US11500297B2

公开(公告)日：2022-11-15

申请号：US16257578

申请日：2019-01-25

Applicant: ASML Netherlands B.V.

Inventor： David Bessems ,  Jon David Tedrow ,  Colin Michael Odneal

IPC: F16L27/00 ,  G03F7/20 ,  H05G2/00

Abstract: A coupling arrangement including a first fitting, a second fitting, and a rotational coupler which when turned presses the first fitting against the second fitting, in which the fittings engage rotationally to inhibit relative rotation of the fittings. For example, one of the fittings may have protrusions and the other fitting may have recesses arranged to receive the protrusions.

公开(公告)号：US10437162B2

公开(公告)日：2019-10-08

申请号：US15711678

申请日：2017-09-21

Applicant: ASML Netherlands B.V.

Inventor： David Bessems ,  Jon David Tedrow ,  Colin Michael Odneal

IPC: G03F7/20

Abstract: A vessel having a seal that is protected from the liquid material within the vessel by a volume of gas. The vessel has a partition that divides the vessel into two volume spaces such that the seal that is in gaseous communication with the first volume space is protected from the liquid material in the second volume space by a volume of gas in the first volume space.