公开(公告)号：US20210311399A1

公开(公告)日：2021-10-07

申请号：US17280969

申请日：2019-10-24

Applicant: ASML Netherlands B.V.

Inventor： Jon David Tedrow

IPC: G03F7/20 ,  H01J37/34

Abstract: An apparatus for supplying a target material includes a reservoir system, a priming system, and a transport system that extends from the priming system to the reservoir system. The reservoir system includes a reservoir in fluid communication with a nozzle supply system. The priming system includes a priming chamber defining a primary cavity; and a removable carrier configured to be received in the primary cavity. The removable carrier defines a secondary cavity configured to receive a solid matter that includes the target material. The transport system is configured to provide a fluid flow path between the priming system and the reservoir system.

公开(公告)号：US20220159817A1

公开(公告)日：2022-05-19

申请号：US17435861

申请日：2020-03-09

Applicant: ASML Netherlands B.V.

Inventor： Abhiram Lakshmi Ganesh Govindaraju ,  David Bessems ,  Sandeep Rai ,  Petrus Adrianus Willems ,  Serkan Kincal ,  Joshua Mark Lukens ,  Jon David Tedrow

IPC: H05G2/00 ,  G03F7/20

Abstract: Provided is an apparatus that includes a first reservoir system including a first fluid reservoir configured to be in fluid communication with a nozzle supply system during operation of the nozzle supply system, a second reservoir system including a second fluid reservoir configured to be, at least part of the time during operation of the nozzle supply system, in fluid communication with the first reservoir system, a priming system configured to produce a fluid target material from a solid matter, and a fluid control system fluidly connected to the priming system, the first reservoir system, the second reservoir system, and the nozzle supply system. The fluid control system is configured to, during operation of the nozzle supply system: isolate at least one fluid reservoir and the nozzle supply system from the priming system, and maintain a fluid flow path between at least one fluid reservoir and the nozzle supply system.

公开(公告)号：US20190155177A1

公开(公告)日：2019-05-23

申请号：US16257578

申请日：2019-01-25

Applicant: ASML Netherlands B.V.

Inventor： David Bessems ,  Jon David Tedrow ,  Colin Michael Odneal

IPC: G03F7/20

Abstract: A vessel having a seal that is protected from the liquid material within the vessel by a volume of gas. The vessel has a partition that divides the vessel into two volume spaces such that the seal that is in gaseous communication with the first volume space is protected from the liquid material in the second volume space by a volume of gas in the first volume space.

公开(公告)号：US11500297B2

公开(公告)日：2022-11-15

申请号：US16257578

申请日：2019-01-25

Applicant: ASML Netherlands B.V.

Inventor： David Bessems ,  Jon David Tedrow ,  Colin Michael Odneal

IPC: F16L27/00 ,  G03F7/20 ,  H05G2/00

Abstract: A coupling arrangement including a first fitting, a second fitting, and a rotational coupler which when turned presses the first fitting against the second fitting, in which the fittings engage rotationally to inhibit relative rotation of the fittings. For example, one of the fittings may have protrusions and the other fitting may have recesses arranged to receive the protrusions.

公开(公告)号：US10437162B2

公开(公告)日：2019-10-08

申请号：US15711678

申请日：2017-09-21

Applicant: ASML Netherlands B.V.

Inventor： David Bessems ,  Jon David Tedrow ,  Colin Michael Odneal

IPC: G03F7/20

Abstract: A vessel having a seal that is protected from the liquid material within the vessel by a volume of gas. The vessel has a partition that divides the vessel into two volume spaces such that the seal that is in gaseous communication with the first volume space is protected from the liquid material in the second volume space by a volume of gas in the first volume space.

公开(公告)号：US11988967B2

公开(公告)日：2024-05-21

申请号：US17280969

申请日：2019-10-24

Applicant: ASML Netherlands B.V.

Inventor： Jon David Tedrow

IPC: G03F7/00 ,  H01J37/34

CPC classification number: G03F7/70033 ,  H01J37/3426

Abstract: An apparatus for supplying a target material includes a reservoir system, a priming system, and a transport system that extends from the priming system to the reservoir system. The reservoir system includes a reservoir in fluid communication with a nozzle supply system. The priming system includes a priming chamber defining a primary cavity; and a removable carrier configured to be received in the primary cavity. The removable carrier defines a secondary cavity configured to receive a solid matter that includes the target material. The transport system is configured to provide a fluid flow path between the priming system and the reservoir system.

公开(公告)号：US11774012B2

公开(公告)日：2023-10-03

申请号：US17270658

申请日：2019-08-12

Applicant: ASML Netherlands B.V.

Inventor： Jon David Tedrow ,  David Bessems ,  Wei-Hsun Chen

IPC: F16L13/02 ,  F16L9/02 ,  H05G2/00

CPC classification number: F16L13/02 ,  F16L9/02 ,  H05G2/006

Abstract: A conduit suitable for use in a high temperature, high pressure environment, the conduit having an elongate portion made of a first refractory metal and a fitting portion made of a second refractory metal attached to an axial end of the elongate portion. The attachment may be made by welding and the second refractory metal may have a greater yield strength than the first refractory metal.

公开(公告)号：US11988307B2

公开(公告)日：2024-05-21

申请号：US17270649

申请日：2019-08-12

Applicant: ASML Netherlands B.V.

Inventor： Jon David Tedrow

IPC: F16L19/02 ,  F16L21/04

CPC classification number: F16L21/04

Abstract: Disclosed is a connector for connecting one fluid handling device (52) such as a conduit to another fluid handling device (70) such as another conduit in which the faces of fittings (54) attached to glands (50) in the connector are given complementary mating configurations (58, 60, 82) so they can mesh that lack circular symmetry so that the faces do not rotate with respect to one another when the faces are subjected to torque when a connection is being made.

公开(公告)号：US11963285B2

公开(公告)日：2024-04-16

申请号：US17435861

申请日：2020-03-09

Applicant: ASML Netherlands B.V.

Inventor： Abhiram Lakshmi Ganesh Govindaraju ,  David Bessems ,  Sandeep Rai ,  Petrus Adrianus Willems ,  Serkan Kincal ,  Joshua Mark Lukens ,  Jon David Tedrow

IPC: H05G2/00 ,  G03F7/00

CPC classification number: H05G2/006 ,  G03F7/70033 ,  H05G2/008

Abstract: Provided is an apparatus that includes a first reservoir system including a first fluid reservoir configured to be in fluid communication with a nozzle supply system during operation of the nozzle supply system, a second reservoir system including a second fluid reservoir configured to be, at least part of the time during operation of the nozzle supply system, in fluid communication with the first reservoir system, a priming system configured to produce a fluid target material from a solid matter, and a fluid control system fluidly connected to the priming system, the first reservoir system, the second reservoir system, and the nozzle supply system. The fluid control system is configured to, during operation of the nozzle supply system: isolate at least one fluid reservoir and the nozzle supply system from the priming system, and maintain a fluid flow path between at least one fluid reservoir and the nozzle supply system.

公开(公告)号：US20210254765A1

公开(公告)日：2021-08-19

申请号：US17270649

申请日：2019-08-12

Applicant: ASML Netherlands B.V.

Inventor： Jon David Tedrow

IPC: F16L21/04

Abstract: Disclosed is a connector for connecting one fluid handling device (52) such as a conduit to another fluid handling device (70) such as another conduit in which the faces of fittings (54) attached to glands (50) in the connector are given complementary mating configurations (58, 60, 82) so they can mesh that lack circular symmetry so that the faces do not rotate with respect to one another when the faces are subjected to torque when a connection is being made.