公开(公告)号：US11963285B2

公开(公告)日：2024-04-16

申请号：US17435861

申请日：2020-03-09

Applicant: ASML Netherlands B.V.

Inventor： Abhiram Lakshmi Ganesh Govindaraju ,  David Bessems ,  Sandeep Rai ,  Petrus Adrianus Willems ,  Serkan Kincal ,  Joshua Mark Lukens ,  Jon David Tedrow

IPC: H05G2/00 ,  G03F7/00

CPC classification number: H05G2/006 ,  G03F7/70033 ,  H05G2/008

Abstract: Provided is an apparatus that includes a first reservoir system including a first fluid reservoir configured to be in fluid communication with a nozzle supply system during operation of the nozzle supply system, a second reservoir system including a second fluid reservoir configured to be, at least part of the time during operation of the nozzle supply system, in fluid communication with the first reservoir system, a priming system configured to produce a fluid target material from a solid matter, and a fluid control system fluidly connected to the priming system, the first reservoir system, the second reservoir system, and the nozzle supply system. The fluid control system is configured to, during operation of the nozzle supply system: isolate at least one fluid reservoir and the nozzle supply system from the priming system, and maintain a fluid flow path between at least one fluid reservoir and the nozzle supply system.

公开(公告)号：US20220159817A1

公开(公告)日：2022-05-19

申请号：US17435861

申请日：2020-03-09

Applicant: ASML Netherlands B.V.

Inventor： Abhiram Lakshmi Ganesh Govindaraju ,  David Bessems ,  Sandeep Rai ,  Petrus Adrianus Willems ,  Serkan Kincal ,  Joshua Mark Lukens ,  Jon David Tedrow

IPC: H05G2/00 ,  G03F7/20

Abstract: Provided is an apparatus that includes a first reservoir system including a first fluid reservoir configured to be in fluid communication with a nozzle supply system during operation of the nozzle supply system, a second reservoir system including a second fluid reservoir configured to be, at least part of the time during operation of the nozzle supply system, in fluid communication with the first reservoir system, a priming system configured to produce a fluid target material from a solid matter, and a fluid control system fluidly connected to the priming system, the first reservoir system, the second reservoir system, and the nozzle supply system. The fluid control system is configured to, during operation of the nozzle supply system: isolate at least one fluid reservoir and the nozzle supply system from the priming system, and maintain a fluid flow path between at least one fluid reservoir and the nozzle supply system.