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公开(公告)号：US08975713B2
公开(公告)日：2015-03-10
申请号：US13976758
申请日：2012-01-05
申请人： Akifumi Sako , Tomoko Takenaka , Kazunari Ishida
发明人： Akifumi Sako , Tomoko Takenaka , Kazunari Ishida
CPC分类号： H01L29/84 , A61B8/4444 , B06B1/0292 , G10K11/002 , Y10T29/49005
摘要： Disclosed is an ultrasonic probe comprising: CMUT cells (13) that mutually convert ultrasonic waves and electrical signals; a semiconductor substrate (15) that has a plurality of the CMUT cells (13) formed on the surface thereof; an acoustic lens (3) that is provided on the front face side of the CMUT cells (13); and a backing layer (5) that is provided on the rear face side of the semiconductor substrate (15). The backing layer (5) is formed by a first backing layer (27) that makes contact with the semiconductor substrate, and a second backing layer (29) that is provided on the rear face side of the backing layer (27). The acoustic impedance of the backing layer (27) is set based on the sheet thickness of the semiconductor substrate (15). The backing layer (29) is formed by attenuating material capable of attenuating ultrasonic waves transmitted through the backing layer (27). Multiple reflection of reflection echoes is suppressed by setting the acoustic impedance of the backing layer (29) to match the acoustic impedance of the backing layer (27).
摘要翻译： 公开了一种超声波探头，包括：CMUT单元（13），其相互转换超声波和电信号; 具有形成在其表面上的多个CMUT单元（13）的半导体基板（15） 设置在CMUT单元（13）的正面侧的声学透镜（3）; 以及设置在半导体基板（15）的背面侧的背衬层（5）。 背衬层（5）由与半导体衬底接触的第一背衬层（27）和设置在背衬层（27）的背面侧上的第二背衬层（29）形成。 背衬层（27）的声阻抗基于半导体衬底（15）的片材厚度来设定。 背衬层（29）由能够衰减透过背衬层（27）的超声波衰减的材料形成。 通过设置背衬层（29）的声阻抗来匹配背衬层（27）的声阻抗来抑制反射回波的多重反射。
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公开(公告)号：US20130285174A1
公开(公告)日：2013-10-31
申请号：US13976758
申请日：2012-01-05
申请人： Akifumi Sako , Tomoko Takenaka , Kazunari Ishida
发明人： Akifumi Sako , Tomoko Takenaka , Kazunari Ishida
IPC分类号： H01L29/84
CPC分类号： H01L29/84 , A61B8/4444 , B06B1/0292 , G10K11/002 , Y10T29/49005
摘要： Disclosed is an ultrasonic probe comprising: CMUT cells (13) that mutually convert ultrasonic waves and electrical signals; a semiconductor substrate (15) that has a plurality of the CMUT cells (13) formed on the surface thereof; an acoustic lens (3) that is provided on the front face side of the CMUT cells (13); and a backing layer (5) that is provided on the rear face side of the semiconductor substrate (15). The backing layer (5) is formed by a first backing layer (27) that makes contact with the semiconductor substrate, and a second backing layer (29) that is provided on the rear face side of the backing layer (27). The acoustic impedance of the backing layer (27) is set based on the sheet thickness of the semiconductor substrate (15). The backing layer (29) is formed by attenuating material capable of attenuating ultrasonic waves transmitted through the backing layer (27). Multiple reflection of reflection echoes is suppressed by setting the acoustic impedance of the backing layer (29) to match the acoustic impedance of the backing layer (27).
摘要翻译： 公开了一种超声波探头，包括：CMUT单元（13），其相互转换超声波和电信号; 具有形成在其表面上的多个CMUT单元（13）的半导体基板（15） 设置在CMUT单元（13）的正面侧的声学透镜（3）; 以及设置在半导体基板（15）的背面侧的背衬层（5）。 背衬层（5）由与半导体衬底接触的第一背衬层（27）和设置在背衬层（27）的背面侧上的第二背衬层（29）形成。 背衬层（27）的声阻抗基于半导体衬底（15）的片材厚度来设定。 背衬层（29）由能够衰减透过背衬层（27）的超声波衰减的材料形成。 通过设置背衬层（29）的声阻抗来匹配背衬层（27）的声阻抗来抑制反射回波的多重反射。
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公开(公告)号：US09642596B2
公开(公告)日：2017-05-09
申请号：US13985122
申请日：2012-01-20
申请人： Chizue Ishihara , Kunio Hashiba , Hiroki Tanaka , Akifumi Sako , Tomoko Takenaka
发明人： Chizue Ishihara , Kunio Hashiba , Hiroki Tanaka , Akifumi Sako , Tomoko Takenaka
CPC分类号： A61B8/14 , A61B8/48 , A61B8/5207 , A61B8/54 , G01S7/52038 , G01S7/52047 , G01S15/8927
摘要： Even when electroacoustic conversion elements with high nonlinearity are employed, a nonlinear imaging is carried out with extracting more nonlinear components. An ultrasonic wave beam is transmitted twice from the transmitter to an identical position on the imaging target, and the signal processor performs computation on the reception signals obtained in every transmission performed twice, thereby extracting a nonlinear component included in the reception signals. In one transmission out of the transmission performed twice, the transmitter delivers the transmission signal to all of multiple electroacoustic conversion elements for driving the electroacoustic conversion elements, and in the other transmission, the transmission signal is delivered selectively only to a part of the multiple electroacoustic conversion elements for driving the electroacoustic conversion elements.
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公开(公告)号：US20130331699A1
公开(公告)日：2013-12-12
申请号：US13985122
申请日：2012-01-20
申请人： Chizue Ishihara , Kunio Hashiba , Hiroki Tanaka , Akifumi Sako , Tomoko Takenaka
发明人： Chizue Ishihara , Kunio Hashiba , Hiroki Tanaka , Akifumi Sako , Tomoko Takenaka
CPC分类号： A61B8/14 , A61B8/48 , A61B8/5207 , A61B8/54 , G01S7/52038 , G01S7/52047 , G01S15/8927
摘要： Even when electroacoustic conversion elements with high nonlinearity are employed, a nonlinear imaging is carried out with extracting more nonlinear components. An ultrasonic wave beam is transmitted twice from the transmitter to an identical position on the imaging target, and the signal processor performs computation on the reception signals obtained in every transmission performed twice, thereby extracting a nonlinear component included in the reception signals. In one transmission out of the transmission performed twice, the transmitter delivers the transmission signal to all of multiple electroacoustic conversion elements for driving the electroacoustic conversion elements, and in the other transmission, the transmission signal is delivered selectively only to a part of the multiple electroacoustic conversion elements for driving the electroacoustic conversion elements.
摘要翻译： 即使使用具有高非线性度的电声转换元件，通过提取更多的非线性分量来执行非线性成像。 将超声波波束从发射机发射两次到成像目标的相同位置，信号处理器对执行两次的每次传输中获得的接收信号执行计算，从而提取包含在接收信号中的非线性分量。 在进行两次传输的一次传输中，发射机将传输信号传送到用于驱动电声转换元件的多个电声转换元件，而在另一个传输中，传输信号仅选择性地传送到多个电声的一部分 用于驱动电声转换元件的转换元件。
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