公开(公告)号：US06280790B1

公开(公告)日：2001-08-28

申请号：US08884192

申请日：1997-06-30

申请人： Anthony F. White ,  Satheesh Kuppurao ,  Brian L. Haas

发明人： Anthony F. White ,  Satheesh Kuppurao ,  Brian L. Haas

IPC分类号： C23C1600

CPC分类号： C23C16/45504 ,  C23C16/4401 ,  C23C16/4408 ,  C23C16/45508 ,  C23C16/45519 ,  C23C16/4586 ,  C23C16/46 ,  C23C16/52 ,  C30B25/10 ,  C30B25/14

摘要： A system and a method for reducing the rate at which volatile contaminants are deposited onto one or more optical components of a substrate processing system are disclosed. A purge fluid is introduced into the processing system at an interior surface of the processing system. A flow of purge fluid is produced across the interior surface to form a contaminant-entraining barrier between a source of the volatile contaminants and the one or more optical components and thereby reduce the rate at which volatile contaminants are deposited onto the optical components of the system. The purge fluid is substantially removed from the processing system.

摘要翻译： 公开了一种用于降低挥发性污染物沉积到基板处理系统的一个或多个光学部件上的速率的系统和方法。 在处理系统的内表面处将清洗流体引入处理系统中。 在内表面上产生清洗流体流，以在挥发性污染源和一个或多个光学部件之间形成污染物夹带势垒，从而降低挥发性污染物沉积到系统的光学部件上的速率 。 吹扫流体基本上从处理系统中移除。

公开(公告)号：US20090194026A1

公开(公告)日：2009-08-06

申请号：US12023572

申请日：2008-01-31

申请人： BRIAN H. BURROWS ,  Lori D. Washington ,  Ronald Stevens ,  Kenric T. Choi ,  Anthony F. White ,  Roger N. Anderson ,  Sandeep Nijhawan ,  Joshua J. Podesta ,  Alexander Tam

发明人： BRIAN H. BURROWS ,  Lori D. Washington ,  Ronald Stevens ,  Kenric T. Choi ,  Anthony F. White ,  Roger N. Anderson ,  Sandeep Nijhawan ,  Joshua J. Podesta ,  Alexander Tam

IPC分类号： C23C16/54

CPC分类号： C23C16/54 ,  C30B25/08 ,  C30B29/403 ,  C30B35/00 ,  H01L21/67017 ,  H01L21/67115 ,  H01L21/67161 ,  H01L21/67207 ,  H01L21/68764 ,  H01L21/68771

摘要： One embodiment of a processing system for fabricating compound nitride semiconductor devices comprises one or more processing chamber operable with form a compound nitride semiconductor layer on a substrate, a transfer chamber coupled with the processing chamber, a loadlock chamber coupled with the transfer chamber, and a load station coupled with the loadlock chamber, wherein the load station comprises a conveyor tray movable to convey a carrier plate loaded with one or more substrates into the loadlock chamber. Compared to a single chamber reactor, the multi-chamber processing system expands the potential complexity and variety of compound structures. Additionally, the system can achieve higher quality and yield by specialization of individual chambers for specific epitaxial growth processes. Throughput is increased by simultaneous processing in multiple chambers.

摘要翻译： 用于制造复合氮化物半导体器件的处理系统的一个实施例包括可在衬底上形成复合氮化物半导体层的可操作的一个或多个处理室，与处理室耦合的传送室，与传送室耦合的负载锁定室，以及 加载站与负载锁定室耦合，其中装载站包括可移动以将装载有一个或多个基板的承载板输送到负载锁定室中的输送器托盘。 与单室反应器相比，多室处理系统扩大了复合结构的潜在复杂性和多样性。 此外，该系统可以通过专用于特定外延生长工艺的各个室来实现更高的质量和产量。 通过在多个室中同时处理来提高吞吐量。

公开(公告)号：US4133918A

公开(公告)日：1979-01-09

申请号：US797738

申请日：1977-05-16

申请人： Douglas P. Simms ,  Anthony F. White ,  Carl W. Miller

发明人： Douglas P. Simms ,  Anthony F. White ,  Carl W. Miller

IPC分类号： B41F31/02 ,  B65D47/18 ,  B05D5/00

CPC分类号： B41F31/02

摘要： A non-contacting, non-clogging, electro-mechanically operated marking device or inker for continuous or intermittently marking a semiconductor wafer die is disclosed together with a method of operating the device. The marking device has an ambient pressure ink reservoir within which is mounted a thin, capillary filament guide tube. A length of filament such as, fishline, is positioned within the tube and secured at one end to the plunger of a solenoid. The distal end of the filament is driven out of the capillary tube by the solenoid to force a small amount of the marking fluid or ink out of the reservoir and onto the die without the filament contacting the die. The solenoid coil is energized by a current pulse having a first current level and a second current level that is less than the first current level. The second current level provides a short holding current for the solenoid to prevent spattering of the marking fluid.

摘要翻译： 公开了一种用于连续或间歇地标记半导体晶片管芯的非接触，非堵塞，电机械操作的标记装置或墨水器以及操作该装置的方法。 标记装置具有环境压力油墨储存器，其中安装有薄的毛细管丝导管。 长丝如钓线位于管内，并在一端固定在螺线管的柱塞上。 灯丝的远端由螺线管从毛细管中驱出，以将少量的标记液或墨水从储存器中挤出并流到模具上，而不会使细丝与模具接触。 电磁线圈由具有小于第一电流电平的第一电流电平和第二电流电平的电流脉冲通电。 第二电流电平为电磁线圈提供短的保持电流，以防止标记液体飞溅。