公开(公告)号：US20220351951A1

公开(公告)日：2022-11-03

申请号：US17244752

申请日：2021-04-29

Applicant: Applied Materials, Inc.

Inventor： Jian LI ,  Juan Carlos ROCHA-ALVAREZ ,  Chidambara A. RAMALINGAM

IPC: H01J37/32 ,  H01L21/67 ,  H01L21/683 ,  H01L21/687 ,  C23C16/50 ,  C23C16/458

Abstract: Aspects generally relate to substrate support apparatus and systems having elevated surfaces for heat transfer between the elevated surfaces and a substrate, and the methods of using the same. In one aspect, the elevated surfaces are disposed between a recessed surface and a plurality of support surfaces of a plurality of support protrusions that extend from the recessed surface. In one aspect, the elevated surfaces are disposed between a base surface and a plurality of support surfaces of a plurality of support protrusions that extend from the base surface. During a substrate processing operation, heat is transferred to the substrate through a plurality of cavities disposed between the elevated surfaces and a backside surface of the substrate.

公开(公告)号：US20200173017A1

公开(公告)日：2020-06-04

申请号：US16697472

申请日：2019-11-27

Applicant: Applied Materials, Inc.

Inventor： Chidambara A. RAMALINGAM ,  Juan Carlos ROCHA ,  Joseph M. POLESE ,  Katty Marie Lydia Gamon GUYOMARD ,  Jian LI

IPC: C23C16/458 ,  H01L21/683 ,  H01J37/32

Abstract: Embodiments of the present disclosure generally relate to substrate support assemblies used in semiconductor device manufacturing. In one embodiment, a substrate support includes a ceramic body having at least one aperture formed therein defined by a sidewall. A plurality of recesses extend into the sidewall, a rod member is disposed in the at least one aperture, and an eyelet member is circumferentially disposed about the rod member. The eyelet member has a plurality of protrusions extending outwardly therefrom, each disposed in a corresponding recess of the plurality of recesses. A first portion of each protrusion is in contact with a sidewall of the respective recess of the ceramic body and a second portion of each protrusion is separated by a gap from the sidewall of the respective recess of the ceramic body. A first portion of a brazing material is disposed between an upper surface of the at least one aperture and an end of the rod member.

公开(公告)号：US20170352569A1

公开(公告)日：2017-12-07

申请号：US15612054

申请日：2017-06-02

Applicant: Applied Materials, Inc.

Inventor： Abdul Aziz KHAJA ,  Xing LIN ,  Edward P. HAMMOND, IV ,  Juan Carlos ROCHA-ALVAREZ ,  Chidambara A. RAMALINGAM ,  Ganesh BALASUBRAMANIAN ,  Ren-Guan DUAN ,  Jianhua ZHOU ,  Jonathan J. STRAHLE

IPC: H01L21/683 ,  H01L21/67

CPC classification number: H01L21/6833 ,  H01L21/67103 ,  H01L21/6831

Abstract: A heated support assembly is disclosed which includes a body comprising aluminum nitride doped with magnesium oxide having a volume resistivity of about 1×1010 Ω-cm at about 600 degrees Celsius, an electrode embedded in the body, and a heater mesh embedded in the body.