公开(公告)号：US11892367B2

公开(公告)日：2024-02-06

申请号：US17692573

申请日：2022-03-11

Applicant: Applied Materials, Inc.

Inventor： Jinxin Fu ,  Kang Luo ,  Fariah Hayee ,  Ludovic Godet

IPC: G01M11/02

CPC classification number: G01M11/0285 ,  G01M11/0207

Abstract: A method of optical device metrology is provided. The method includes introducing a first type of light into a first optical device during a first time period, the first optical device including an optical substrate and an optical film disposed on the optical substrate, the first optical device further including a first surface, a second surface, and one or more sides connecting the first surface with the second surface; and measuring, during the first time period, a quantity of the first type of light transmitted from a plurality of locations on the first surface or the second surface during the first time period, wherein the measuring is performed by a detector coupled to one or more fiber heads positioned to collect the light transmitted from the plurality of locations.

公开(公告)号：US12140494B2

公开(公告)日：2024-11-12

申请号：US18397977

申请日：2023-12-27

Applicant: Applied Materials, Inc.

Inventor： Jinxin Fu ,  Kang Luo ,  Fariah Hayee ,  Ludovic Godet

IPC: G01M11/02

Abstract: A method of optical device metrology is provided. The method includes introducing a first type of light into a first optical device during a first time period, the first optical device including an optical substrate and an optical film disposed on the optical substrate, the first optical device further including a first surface, a second surface, and one or more sides connecting the first surface with the second surface; and measuring, during the first time period, a quantity of the first type of light transmitted from a plurality of locations on the first surface or the second surface during the first time period, wherein the measuring is performed by a detector coupled to one or more fiber heads positioned to collect the light transmitted from the plurality of locations.