公开(公告)号：US20210354934A1

公开(公告)日：2021-11-18

申请号：US17272582

申请日：2018-09-19

Applicant: Henning AUST ,  Thorsten MEISS ,  Applied Materials, Inc.

Inventor： Henning AUST ,  Thorsten MEISS

IPC: B65G54/02

Abstract: A magnetic levitation system for contactlessly holding and moving a carrier in a vacuum chamber, including a base defining a transportation track, a carrier movable above the base along the transportation track, and at least one magnetic bearing for generating a magnetic levitation force between the base and the carrier. The at least one magnetic bearing includes a first magnet unit arranged at the base and a second magnet unit arranged at the carrier. The magnetic levitation system further includes a magnetic side stabilization device for stabilizing the carrier in a lateral direction, the magnetic side stabilization device comprising a stabilization magnet unit arranged at the base, wherein at least one of the first magnet unit and the first stabilization magnet unit is arranged in a housing space of the base, the housing space being separated from an inner volume of the vacuum chamber by a separation wall.

公开(公告)号：US20220208426A1

公开(公告)日：2022-06-30

申请号：US17607599

申请日：2019-04-29

Applicant: Applied Materials, Inc.

Inventor： Henning AUST ,  Timo ADLER ,  Clemens PIHAN

IPC: H01F7/02 ,  H01L21/677 ,  C23C14/50 ,  C23C14/56 ,  C23C16/458 ,  C23C16/54

Abstract: A magnetic levitation system for transporting a carrier is described. The magnetic levitation system includes a base defining a transportation track, a carrier movable relative to the base along the transportation track, and a plurality of active magnetic bearings provided at the base and configured to face a guided structure of the carrier. The guided structure includes a first guided zone and a second guided zone configured to interact with the plurality of active magnetic bearings and a recessed zone. The recessed zone is arranged between the first guided zone and the second guided zone in a transport direction of the carrier and is recessed with respect to the first guided zone and the second guided zone.

公开(公告)号：US20220393618A1

公开(公告)日：2022-12-08

申请号：US17770237

申请日：2019-11-27

Applicant: Applied Materials, Inc.

Inventor： Henning AUST ,  Clemens PIHAN ,  Timo ADLER ,  Martin AENIS

IPC: H02N15/00 ,  H02K41/02 ,  B65G54/02

Abstract: A magnetic levitation system (100) for transporting a carrier (10) in a transport direction (T) is described. The magnetic levitation system includes at least one magnetic bearing (120) having a first actuator (121) with a U-shaped electromagnet for contactlessly holding the carrier (10) in a carrier transportation space (15), and a drive unit (130) having a second actuator (131) for moving the carrier (10) in the transport direction. The second actuator (131) or a projection of the second actuator along the transport direction (T) is partially surrounded by the U-shaped electromagnet.

公开(公告)号：US20210225677A1

公开(公告)日：2021-07-22

申请号：US16302609

申请日：2017-08-24

Applicant: Henning AUST ,  Jorg SCHULER ,  Applied Materials, Inc.

Inventor： Henning AUST ,  Jörg SCHULER

IPC: H01L21/677 ,  H01L21/687 ,  H01L21/67 ,  B65G54/02 ,  B65G43/00 ,  C23C14/50 ,  C23C14/54 ,  C23C14/56

Abstract: An apparatus for contactless transportation of a device in a vacuum processing system is described. The apparatus includes: a magnetic transportation arrangement for providing a magnetic levitation force (FL) for levitating the device, the magnetic transportation arrangement comprising one or more active magnetic units; a sensor for monitoring a motion of the device, and a controller configured for controlling the one or more active magnetic units based on a signal provided by the sensor.