公开(公告)号：US20200258214A1

公开(公告)日：2020-08-13

申请号：US16414709

申请日：2019-05-16

Applicant: Applied Materials, Inc.

Inventor： Nojan Motamedi ,  Dominic J. Benvegnu ,  Boguslaw A. Swedek ,  Martin A. Josefowicz

IPC: G06T7/00 ,  G06T5/00 ,  H01L21/67 ,  G01B11/06

Abstract: A layer thickness measurement system includes a support to hold a substrate, an optical sensor to capture a color image of at least a portion of the substrate, and a controller. The controller is configured to receive the color image from the optical sensor, store a function that provides a value representative of a thickness as a function of position along a predetermined path in a coordinate space of at least two dimensions including a first color channel and a second color channel, for a pixel of the color image determine a coordinate of the pixel in the coordinate space from color data in the color image, determine a position of a point on the predetermined path that is closest to the coordinate, and calculate a value representative of a thickness from the function and the position of the point on the predetermined path.

公开(公告)号：US20210358113A1

公开(公告)日：2021-11-18

申请号：US17388961

申请日：2021-07-29

Applicant: Applied Materials, Inc.

Inventor： Nojan Motamedi ,  Dominic J. Benvegnu ,  Boguslaw A. Swedek ,  Martin A. Josefowicz

IPC: G06T7/00 ,  G06T5/00 ,  H01L21/67 ,  G01B11/06

Abstract: A layer thickness measurement system includes a support to hold a substrate, an optical sensor to capture a color image of at least a portion of the substrate, and a controller. The controller is configured to receive the color image from the optical sensor, perform a color correction on the color image to generate an adjusted color image having increased color contrast, determine a coordinate of the pixel in a coordinate space of at least two dimensions including a first color channel and a second color channel from color data in the adjusted color image for each of the adjusted color image, and calculate a value representative of a thickness based on the coordinate of the pixel of the adjusted color image in the coordinate space.

公开(公告)号：US11776109B2

公开(公告)日：2023-10-03

申请号：US17388961

申请日：2021-07-29

Applicant: Applied Materials, Inc.

Inventor： Nojan Motamedi ,  Dominic J. Benvegnu ,  Boguslaw A. Swedek ,  Martin A. Josefowicz

IPC: G06T7/00 ,  G06T5/00 ,  H01L21/67 ,  G01B11/06

CPC classification number: G06T7/0006 ,  G01B11/06 ,  G06T5/009 ,  H01L21/67253 ,  G01B2210/56 ,  G06T2207/10024 ,  G06T2207/20208 ,  G06T2207/30148

Abstract: A layer thickness measurement system includes a support to hold a substrate, an optical sensor to capture a color image of at least a portion of the substrate, and a controller. The controller is configured to receive the color image from the optical sensor, perform a color correction on the color image to generate an adjusted color image having increased color contrast, determine a coordinate of the pixel in a coordinate space of at least two dimensions including a first color channel and a second color channel from color data in the adjusted color image for each of the adjusted color image, and calculate a value representative of a thickness based on the coordinate of the pixel of the adjusted color image in the coordinate space.

公开(公告)号：US11100628B2

公开(公告)日：2021-08-24

申请号：US16414709

申请日：2019-05-16

Applicant: Applied Materials, Inc.

Inventor： Nojan Motamedi ,  Dominic J. Benvegnu ,  Boguslaw A. Swedek ,  Martin A. Josefowicz

IPC: G06T7/00 ,  G06T5/00 ,  H01L21/67 ,  G01B11/06

Abstract: A layer thickness measurement system includes a support to hold a substrate, an optical sensor to capture a color image of at least a portion of the substrate, and a controller. The controller is configured to receive the color image from the optical sensor, store a function that provides a value representative of a thickness as a function of position along a predetermined path in a coordinate space of at least two dimensions including a first color channel and a second color channel, for a pixel of the color image determine a coordinate of the pixel in the coordinate space from color data in the color image, determine a position of a point on the predetermined path that is closest to the coordinate, and calculate a value representative of a thickness from the function and the position of the point on the predetermined path.