公开(公告)号：US20210066019A1

公开(公告)日：2021-03-04

申请号：US16734979

申请日：2020-01-06

Applicant: Applied Materials, Inc.

Inventor： Shengwu Chang ,  Frank Sinclair ,  Michael St. Peter

IPC: H01J37/08

Abstract: An IHC ion source that employs a negatively biased cathode and one or more side electrodes is disclosed. The one or more side electrodes are biased using an electrode power supply, which supplies a voltage of between 0 and −50 volts, relative to the chamber. By adjusting the output from the electrode power supply, beam current can be optimized for different species. For example, certain species, such as arsenic, may be optimized when the side electrodes are at the same voltage as the chamber. Other species, such as boron, may be optimized when the side electrodes are at a negative voltage relative to the chamber. In certain embodiments, a controller is in communication with the electrode power supply so as to control the output of the electrode power supply, based on the desired feed gas.

公开(公告)号：US10600611B2

公开(公告)日：2020-03-24

申请号：US16190649

申请日：2018-11-14

Applicant: APPLIED Materials, Inc.

Inventor： Klaus Becker ,  Daniel Alvarado ,  Michael St. Peter ,  Graham Wright

IPC: H01J37/08 ,  H01J37/34 ,  H01J37/32

Abstract: An ion source with a crucible is disclosed. In some embodiments, the crucible is disposed in one of the ends of the ions source, opposite the cathode. In other embodiments, the crucible is disposed in one of the side walls. A feed material, which may be in solid form is disposed in the crucible. In certain embodiments, the feed material is sputtered by ions and electrons in the plasma. In other embodiments, the feed material is heated so that it vaporizes. The ion source may be oriented so that the crucible is disposed in the lowest wall so that gravity retains the feed material in the crucible.

公开(公告)号：US11120966B2

公开(公告)日：2021-09-14

申请号：US16734979

申请日：2020-01-06

Applicant: Applied Materials, Inc.

Inventor： Shengwu Chang ,  Frank Sinclair ,  Michael St. Peter

IPC: H01J37/08

Abstract: An IHC ion source that employs a negatively biased cathode and one or more side electrodes is disclosed. The one or more side electrodes are biased using an electrode power supply, which supplies a voltage of between 0 and −50 volts, relative to the chamber. By adjusting the output from the electrode power supply, beam current can be optimized for different species. For example, certain species, such as arsenic, may be optimized when the side electrodes are at the same voltage as the chamber. Other species, such as boron, may be optimized when the side electrodes are at a negative voltage relative to the chamber. In certain embodiments, a controller is in communication with the electrode power supply so as to control the output of the electrode power supply, based on the desired feed gas.

公开(公告)号：US11232925B2

公开(公告)日：2022-01-25

申请号：US16735053

申请日：2020-01-06

Applicant: Applied Materials, Inc.

Inventor： Shengwu Chang ,  Frank Sinclair ,  Michael St. Peter

IPC: H01J7/24 ,  H05B31/26 ,  H01J27/20

Abstract: An IHC ion source that employs a negatively biased cathode and one or more side electrodes is disclosed. The one or more side electrodes are left electrically unconnected in certain embodiments and are grounded in other embodiments. The floating side electrodes may be beneficial in the formation of certain species. In certain embodiments, a relay is used to allow the side electrodes to be easily switched between these two modes. By changing the configuration of the side electrodes, beam current can be optimized for different species. For example, certain species, such as arsenic, may be optimized when the side electrodes are at the same voltage as the chamber. Other species, such as boron, may be optimized when the side electrodes are left floating relative to the chamber. In certain embodiments, a controller is in communication with the relay so as to control which mode is used, based on the desired feed gas.

公开(公告)号：US20210066017A1

公开(公告)日：2021-03-04

申请号：US16735053

申请日：2020-01-06

Applicant: Applied Materials, Inc.

Inventor： Shengwu Chang ,  Frank Sinclair ,  Michael St. Peter

IPC: H01J27/20

Abstract: An IHC ion source that employs a negatively biased cathode and one or more side electrodes is disclosed. The one or more side electrodes are left electrically unconnected in certain embodiments and are grounded in other embodiments. The floating side electrodes may be beneficial in the formation of certain species. In certain embodiments, a relay is used to allow the side electrodes to be easily switched between these two modes. By changing the configuration of the side electrodes, beam current can be optimized for different species. For example, certain species, such as arsenic, may be optimized when the side electrodes are at the same voltage as the chamber. Other species, such as boron, may be optimized when the side electrodes are left floating relative to the chamber. In certain embodiments, a controller is in communication with the relay so as to control which mode is used, based on the desired feed gas.

公开(公告)号：US20190180971A1

公开(公告)日：2019-06-13

申请号：US16190649

申请日：2018-11-14

Applicant: APPLIED Materials, Inc.

Inventor： Klaus Becker ,  Daniel Alvarado ,  Michael St. Peter ,  Graham Wright

IPC: H01J37/08 ,  H01J37/34

Abstract: An ion source with a crucible is disclosed. In some embodiments, the crucible is disposed in one of the ends of the ions source, opposite the cathode. In other embodiments, the crucible is disposed in one of the side walls. A feed material, which may be in solid form is disposed in the crucible. In certain embodiments, the feed material is sputtered by ions and electrons in the plasma. In other embodiments, the feed material is heated so that it vaporizes. The ion source may be oriented so that the crucible is disposed in the lowest wall so that gravity retains the feed material in the crucible.