公开(公告)号：US20230408413A1

公开(公告)日：2023-12-21

申请号：US18334186

申请日：2023-06-13

Applicant: Applied Materials, Inc.

Inventor： Viswanath BAVIGADDA ,  Shubhayan BHATTACHARYA ,  Tapashree ROY ,  Ankur KADAM ,  Kiran Rangaswamy AATRE ,  Suraj RENGARAJAN

IPC: G01N21/64 ,  G01N21/39

CPC classification number: G01N21/6456 ,  G01N21/643 ,  G01N21/39 ,  G01N2021/399 ,  G01N2201/0633 ,  G01N2201/1235 ,  G01N21/94

Abstract: In one embodiment, an apparatus to identify chemical and spatial properties of nanoparticles in a semiconductor cleaning solution, comprises a broadband light source to provide an excitation beam; a focusing lens in a path of the excitation beam to form a focused excitation beam; a sample cell, the sample cell configured to hold a cleaning solution and one or more insoluble analytes-of-interest therein; a plurality of optical lens in the path of one or more fluorescence signals to focus the one or more fluorescence signals; and an imaging device, wherein the imaging device captures the one or more fluorescence signals to form a plurality of images that contain both spatial data and spectral data about the one or more insoluble analytes-of-interest.