公开(公告)号：US20190080447A1

公开(公告)日：2019-03-14

申请号：US15701371

申请日：2017-09-11

Applicant: Applied Materials Israel Ltd.

Inventor： Ariel SHKALIM ,  Moshe AMZALEG ,  Eyal NEISTEIN ,  Shlomo TUBUL ,  Mark GESHEL ,  Elad COHEN

IPC: G06T7/00 ,  G06T7/11

Abstract: There are provided system and method of generating an examination recipe usable for examining a specimen, the method comprising: capturing images from dies and obtaining noise map indicative of noise distribution on the images; receiving design data representative of a plurality of design groups each having the same design pattern; calculating a group score for each given design group, the group score calculated based on the noise data associated with the given design group and a defect budget allocated for area of the given design group; providing segmentation related to the dies, comprising: associating design groups with segmentation labels indicative of different noise levels based on the group score, thereby obtaining a set of die segments each corresponding to one or more design groups associated with the same segmentation label and segmentation configuration data; and generating an examination recipe using the segmentation configuration data.