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公开(公告)号：US20230206417A1
公开(公告)日：2023-06-29
申请号：US17565273
申请日：2021-12-29
发明人： Elad COHEN , Victor EGOROV , Ilan BEN-HARUSH , Rafael BISTRITZER
CPC分类号： G06T7/0004 , G06T7/10
摘要： There is provided a system of examination of a semiconductor specimen, comprising a processor and memory circuitry configured to obtain, for each given candidate defect of a plurality of candidate defects in an image of the specimen, a given area of the given candidate defect in the image, obtain a reference image, perform a segmentation of at least part of the reference image, to determine, for each given candidate defect, first reference areas in the reference image matching a given reference area corresponding to the given area, select among the first reference areas, a plurality of second reference areas, obtain a plurality of corresponding second areas in the image, and use data informative of a pixel intensity of the second areas and data informative of a pixel intensity of the given area to determine whether the given candidate defect corresponds to a defect.
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公开(公告)号：US20190080447A1
公开(公告)日：2019-03-14
申请号：US15701371
申请日：2017-09-11
发明人： Ariel SHKALIM , Moshe AMZALEG , Eyal NEISTEIN , Shlomo TUBUL , Mark GESHEL , Elad COHEN
摘要： There are provided system and method of generating an examination recipe usable for examining a specimen, the method comprising: capturing images from dies and obtaining noise map indicative of noise distribution on the images; receiving design data representative of a plurality of design groups each having the same design pattern; calculating a group score for each given design group, the group score calculated based on the noise data associated with the given design group and a defect budget allocated for area of the given design group; providing segmentation related to the dies, comprising: associating design groups with segmentation labels indicative of different noise levels based on the group score, thereby obtaining a set of die segments each corresponding to one or more design groups associated with the same segmentation label and segmentation configuration data; and generating an examination recipe using the segmentation configuration data.
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公开(公告)号：US20190066291A1
公开(公告)日：2019-02-28
申请号：US15683726
申请日：2017-08-22
发明人： Limor MARTIN , Elad COHEN , Eyal NEISTEIN , Moshe AMZALEG
CPC分类号： G06T7/0008 , G01N21/95607 , G06T5/002 , G06T7/001 , G06T2207/10061 , G06T2207/20224 , G06T2207/30148 , H01L21/67288 , H01L22/12
摘要： There are provided system and method of detecting defects on a specimen, the method comprising: capturing a first image from a first die and obtaining one or more second images; receiving: i) a first set of predefined first descriptors each representing a type of DOI, and ii) a second set of predefined second descriptors each representing a type of noise; generating at least one difference image based on difference between pixel values of the first image and pixel values derived from the second images; generating at least one third image, comprising: computing a value for each given pixel of at least part of the at least one difference image based on the first and second sets of predefined descriptors, and surrounding pixels centered around the given pixel; and determining presence of defect candidates based on the at least one third image and a predefined threshold.
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公开(公告)号：US20210042905A1
公开(公告)日：2021-02-11
申请号：US16533737
申请日：2019-08-06
发明人： Elad COHEN , Yuri FEIGIN , Lior KATZ , Eyal NEISTEIN
摘要： A method and system for detecting defects in a specimen, the method comprising: obtaining an image comprising a plurality of pixels of a specimen part; processing the image according to a detection recipe to derive information related to potential defects in the specimen, said information comprising a first data set informative of first locations identified, in accordance with the detection recipe as locations of potential defects, and a second data set informative of second locations not identified as locations of potential defects; receiving data specifying targeted locations of interest within the part of the specimen; when the first data set is not informative of each targeted location, generating a third data set by adding to the first data set information related to the missing targeted location from the second data set, the information bearing an indication that it corresponds to a targeted location; and outputting the third data set.
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