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1.发明申请公开(公告)号：US20190234887A1
公开(公告)日：2019-08-01
申请号：US16227453
申请日：2018-12-20
发明人： Idan KAIZERMAN , Mark GESHEL
摘要： Data indicative of alignment targets may be received. Each alignment target may be associated with a target location on an object. Locations of the object to be inspected may be identified. An alignment target from the alignment targets may be selected. Each of the locations may be within a determined distance from the selected alignment target. An indication may be provided to align the object relative to an examination tool for inspecting the locations within the determined distance from the selected alignment target.
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公开(公告)号：US20190080447A1
公开(公告)日：2019-03-14
申请号：US15701371
申请日：2017-09-11
发明人： Ariel SHKALIM , Moshe AMZALEG , Eyal NEISTEIN , Shlomo TUBUL , Mark GESHEL , Elad COHEN
摘要： There are provided system and method of generating an examination recipe usable for examining a specimen, the method comprising: capturing images from dies and obtaining noise map indicative of noise distribution on the images; receiving design data representative of a plurality of design groups each having the same design pattern; calculating a group score for each given design group, the group score calculated based on the noise data associated with the given design group and a defect budget allocated for area of the given design group; providing segmentation related to the dies, comprising: associating design groups with segmentation labels indicative of different noise levels based on the group score, thereby obtaining a set of die segments each corresponding to one or more design groups associated with the same segmentation label and segmentation configuration data; and generating an examination recipe using the segmentation configuration data.
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