摘要:
An objective is to achieve a positional change measurement device which measures positional change of a dynamic measured surface by using speckle patterns while easily reducing influence of fluctuations in a measurement environment temperature. Provided is a positional change measurement device including: a light source; an illuminating optical system configured to guide light from the light source to a measured surface; an imaging optical system; an image pickup device configured to acquire a speckle pattern by receiving reflection light from the measured surface via the imaging optical system; and detected-length compensation means for compensating for fluctuations in a detected length caused by temperature fluctuations. Positional change of the measured surface is measured based on a result of cross-correlation computation performed on multiple speckle patterns acquired at predetermined time intervals.
摘要:
An optical processing apparatus includes a light source, a condensing lens, and a light shield. The light source emits a light. The condensing lens converts a light emitted from the light source into a Bessel beam and condenses the light onto a surface of an object. The light shield shields an outer edge portion of the light in a cross section of a direction orthogonal to the optical axis of the light. The light shield may shield the outer edge portion of the light after entering the condensing lens and before condensing onto the surface of the object in the cross section of the direction orthogonal to the optical axis of the light.
摘要:
An imaging unit includes an image pickup element extending along a surface parallel to an imaging surface, a circuit board including a circuit to drive the image pickup element, and a plurality of fixing members to fix the image pickup element and the circuit board. The circuit board includes at least one through hole on a straight line that extends in a longitudinal direction of the image pickup element and is provided with the plurality of the fixing members. The through hole is provided at a position between at least two of the plurality of the fixing members on the straight line.