公开(公告)号：US3912611A

公开(公告)日：1975-10-14

申请号：US33976873

申请日：1973-03-12

Applicant: BELL TELEPHONE LABOR INC

Inventor： ROYER WILLIAM ANTHONY ,  TESTARDI LOUIS RICHARD ,  WERNICK JACK HARRY

IPC: C22C27/00 ,  C22C27/04 ,  C23C14/14 ,  C23C5/00 ,  B44C1/18

CPC classification number: C23C14/14 ,  B26B21/60 ,  C22C27/04 ,  C23C14/3414 ,  F16C33/121 ,  Y10S505/816 ,  Y10T428/261 ,  Y10T428/266 ,  Y10T428/31678

Abstract: Film materials produced by low temperature deposition show a variety of device-significant properties. Film compositions center about the nominal formulae Mo5Ru3 and W3Ru2. Films, conveniently deposited by sputtering, show high values of hardness, corrosion resistance, and reflectivity. Resistivities, as well as temperature coefficient of resistance, may be varied over a broad range dependent upon deposition temperature.

Abstract translation: 通过低温沉积生产的薄膜材料显示出各种器件的显着特性。 电影作品集中在名义公式Mo5Ru3和W3Ru2上。 通过溅射方便地沉积的膜显示出高的硬度值，耐腐蚀性和反射率。 电阻率以及电阻温度系数可以根据沉积温度在宽范围内变化。