Substrate process apparatus
    1.
    发明授权

    公开(公告)号:US11476139B2

    公开(公告)日:2022-10-18

    申请号:US17180298

    申请日:2021-02-19

    Abstract: A linear electrical machine comprising a frame with a level reference plane and an array of electromagnets, connected to the frame to form a drive plane at a predetermined height relative to the reference plane. The array of electromagnets being arranged so that a series of electromagnets of the array of electromagnets define at least one drive line within the drive plane, and each of the electromagnets being coupled to an alternating current power source energizing each electromagnet. At least one reaction platen of paramagnetic, diamagnetic, or non-magnetic conductive material disposed to cooperate with the electromagnets of the array of electromagnets so that excitation of the electromagnets with alternating current generates levitation and propulsion forces against the reaction platen that controllably levitate and propel the reaction platen along at least one drive line, in a controlled attitude relative to the drive plane.

    SUBSTRATE PROCESS APPARATUS
    3.
    发明申请

    公开(公告)号:US20210265188A1

    公开(公告)日:2021-08-26

    申请号:US17180298

    申请日:2021-02-19

    Abstract: A linear electrical machine comprising a frame with a level reference plane and an array of electromagnets, connected to the frame to form a drive plane at a predetermined height relative to the reference plane. The array of electromagnets being arranged so that a series of electromagnets of the array of electromagnets define at least one drive line within the drive plane, and each of the electromagnets being coupled to an alternating current power source energizing each electromagnet. At least one reaction platen of paramagnetic, diamagnetic, or non-magnetic conductive material disposed to cooperate with the electromagnets of the array of electromagnets so that excitation of the electromagnets with alternating current generates levitation and propulsion forces against the reaction platen that controllably levitate and propel the reaction platen along at least one drive line, in a controlled attitude relative to the drive plane.

    SCALABLE MOTION CONTROL SYSTEM
    4.
    发明申请
    SCALABLE MOTION CONTROL SYSTEM 审中-公开
    可调节运动控制系统

    公开(公告)号:US20160018816A1

    公开(公告)日:2016-01-21

    申请号:US14698110

    申请日:2015-04-28

    Abstract: A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.

    Abstract translation: 控制系统包括具有主控制器的集群架构,包括主控制器的直接控制下的一个或多个第一遥控器的中央控制部分,以及包括由主控制器控制的集群控制器的分布式控制部分。 集群控制器控制一个或多个第二个遥控器的活动。 第一和第二遥控器中的每一个被用于驱动一个或多个轴。

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