公开(公告)号：US20160003610A1

公开(公告)日：2016-01-07

申请号：US14323237

申请日：2014-07-03

Applicant: CADENT LTD.

Inventor： Erez Lampert ,  Adi Levin ,  Tal Verker

IPC: G01B11/24 ,  A61C9/00 ,  G01S17/08

CPC classification number: G01B11/2513 ,  A61C9/0053 ,  A61C9/006 ,  G01B11/24 ,  G01B11/25 ,  G01B11/2518 ,  G01B11/303 ,  G01S17/08 ,  G02B3/0056 ,  G02B21/0028 ,  G02B21/006 ,  G02B23/2461 ,  G02B23/26

Abstract: An apparatus is described for measuring surface topography of a three-dimensional structure. In many embodiments, the apparatus is configured to focus each of a plurality of light beams to a respective fixed focal position relative to the apparatus. The apparatus measures a characteristic of each of a plurality of returned light beams that are generated by illuminating the three-dimensional structure with the light beams. The characteristic is measured for a plurality of different positions and/or orientations between the apparatus and the three-dimensional structure. Surface topography of the three-dimensional structure is determined based at least in part on the measured characteristic of the returned light beams for the plurality of different positions and/or orientations between the apparatus and the three-dimensional structure.