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公开(公告)号:US20180356452A1
公开(公告)日:2018-12-13
申请号:US15781226
申请日:2016-11-30
Applicant: CORNING INCORPORATED
Inventor: Gabriel Pierce Agnello , Peter Knowles , Correy Robert
CPC classification number: G01R29/24 , G01R31/2831
Abstract: Disclosed herein are apparatuses and methods for measuring electrostatic charge on a surface of a substrate. The apparatuses comprise a substrate mounting platform, a substrate contacting component, and at least one voltage sensor, wherein the apparatus is programmed to independently control the rotational and translation velocity of a roller and/or to measure a voltage of the substrate at multiple points to produce a two-dimensional map of voltage for at least a portion of the substrate.