TEST CIRCUIT CAPABLE OF EFFICIENTLY UTILIZING MOUNTING AREA

    公开(公告)号:US20240345159A1

    公开(公告)日:2024-10-17

    申请号:US18683270

    申请日:2022-07-08

    IPC分类号: G01R31/3163 G01R31/28

    CPC分类号: G01R31/3163 G01R31/2831

    摘要: Provided is a test circuit configured to receive an inspection command from automatic test equipment (ATE) and test a device under test (DUT), and the test circuit includes a plurality of analog inspection circuits electrically connected to the DUT to test an operation thereof, and a digital control circuit configured to control operations of the analog inspection circuits, wherein the digital control circuit and the analog inspection circuits are located apart from each other.

    PREHEATING CONTROL SYSTEM, PREHEATING CONTROL METHOD AND NON-TRANSIENT COMPUTER READABLE STORAGE MEDIUM

    公开(公告)号:US20240345135A1

    公开(公告)日:2024-10-17

    申请号:US18299711

    申请日:2023-04-12

    发明人: Tien Yu CHEN

    IPC分类号: G01R1/44 G01R31/28

    CPC分类号: G01R1/44 G01R31/2831

    摘要: A preheating control system comprising a testing device and a processor is provided in present disclosure. The testing device is configured to perform a wafer testing on a wafer lot and perform a device preheating on the testing device. The processor is coupled to the testing device and comprises a timing circuit and a controlling circuit. The timing circuit is configured to calculate a lot-changing time, wherein the lot-changing time is a difference between a time corresponding to removal of a previous wafer lot from the testing device and a time corresponding to insertion of the wafer lot into the testing device. The controlling circuit is configured to control the testing device to perform the wafer testing, and configured to control the testing device to perform the device preheating according to the lot-changing time and a standard lot-changing time.

    Random characteristic evaluation of subject maps

    公开(公告)号:US12107019B2

    公开(公告)日:2024-10-01

    申请号:US17000528

    申请日:2020-08-24

    发明人: Shun Hirao

    摘要: According to an embodiment, an information processing apparatus includes one or more processors. The processors are configured to: generate a plurality of shuffle maps obtained by randomly shuffling, from positions to others, at least some of subject values contained in a subject map having the subject values arrayed in N dimensions (N is an integer of 1 or more); generate a subject vector expressing features of a frequency domain of the subject map and random vectors expressing features of respective frequency domains of the shuffle maps; and derive, as an evaluation value for whether the subject map has a random characteristic, a testing result of statistical hypothesis testing on feature differences between the subject vector and the respective random vectors.

    Semiconductor testing device and method of operating the same

    公开(公告)号:US12050245B2

    公开(公告)日:2024-07-30

    申请号:US17664771

    申请日:2022-05-24

    IPC分类号: G01R31/28

    CPC分类号: G01R31/2831 G01R31/2884

    摘要: A plurality of devices for testing, connected in series using one or more redistribution layers (RDLs), are used to perform a semiconductor device test on a plurality of dies. As a result, the semiconductor device test may support thousands of gross dies per wafer or greater (e.g., 10,000 dies or greater). Furthermore, the RDL(s) may be removed after use. In some implementations, the devices for testing corresponding to the dies may execute the semiconductor device test sequentially. Accordingly, test data may be generated and may include a bit sequence, where a first bit in the bit sequence indicates an overall outcome for the test and one or more subsequent bits in the bit sequence indicate respective outcomes for each semiconductor dies or for each line of the semiconductor device test.

    METHOD AND DEVICE FOR MEASURING SEMICONDUCTOR MULTILAYER STRUCTURE BASED ON SECOND HARMONIC

    公开(公告)号:US20240038600A1

    公开(公告)日:2024-02-01

    申请号:US18272126

    申请日:2022-05-10

    IPC分类号: H01L21/66 G01R31/28 G01R31/26

    摘要: A measuring method and device based on the second harmonic for the whole area measurement of a wafer comprises three modes: a fixed-point measurement, a scanning measurement, and a combination of the fixed-point measurement and the scanning measurement. The scanning measurement solution measures the entire wafer under the premise of ensuring high measurement efficiency, obtain the position, size and relative density distribution of electrical defects, and achieve locating and checking of abnormal points on the wafer. A new formula system is provided for describing the second harmonic signal, so that the actual measurement results and the theoretical model are unified under the three modes of the fixed-point measurement, the scanning measurement, and the combination of fixed-point measurement and scanning measurement, so that the second harmonic metrology technology is no longer only a qualitative analysis method, but also a quantitative analysis method.

    WAFER TESTER AND WAFER TESTING METHOD AND SYSTEM

    公开(公告)号:US20240027518A1

    公开(公告)日:2024-01-25

    申请号:US17813934

    申请日:2022-07-21

    发明人: Ching-Chung WANG

    IPC分类号: G01R31/28

    CPC分类号: G01R31/2834 G01R31/2831

    摘要: The present disclosure provides a wafer testing method, including: assigning multiple testing programs to multiple wafers, wherein each of the testing programs includes testing algorithms configured to measure parameters of the wafers; setting multiple sets of testing conditions for the testing programs; and testing at least one of the wafers by executing a corresponding one of the testing programs according to a corresponding one of the testing conditions.