公开(公告)号：US20230002884A1

公开(公告)日：2023-01-05

申请号：US17779231

申请日：2020-11-19

Applicant: CORNING INCORPORATED

Inventor： Chang-gyu Kim ,  Jeonghong Oh ,  Jung-Hun Yun

IPC: C23C14/50 ,  C23C14/54

Abstract: A system is described herein for film deposition includes a drum; a motor configured to rotate the drum in a direction of rotation; a target including a target material; and a holder attached to the drum. The holder is configured to accommodate a substrate and to expose the substrate to free particles of the target material sputtered from the target, and the holder has an asymmetric shape.

公开(公告)号：US11338257B2

公开(公告)日：2022-05-24

申请号：US16675786

申请日：2019-11-06

Applicant: Corning Incorporated

Inventor： John Alan Langstrand ,  Dong-gun Moon ,  Elias Panides ,  Abhijit Rao ,  Jung-Hun Yun

IPC: B01F25/42 ,  B01F25/421 ,  C23C16/455 ,  B01F23/10

Abstract: A fluid distributor comprises a first conduit extending along a first elongated axis and a second conduit circumscribing the first conduit. A first area comprises a cross-sectional flow area of the first conduit taken perpendicular to the first elongated axis. The first conduit comprises a first plurality of orifices comprising a first combined cross-sectional area. The second conduit comprises a second plurality of orifices comprising a second combined cross-sectional area. A first ratio of the first area to the first combined cross-sectional area can be about 2 or more. A second ratio of the first combined cross-sectional area to the second combined cross-sectional area can be about 2 or more. An angle between a direction of an orifice axis of a first orifice of the first plurality of orifices and a direction of an orifice axis of a first orifice of the second plurality of orifices can be from about 45° to 180°.