公开(公告)号：US20240266139A1

公开(公告)日：2024-08-08

申请号：US18431498

申请日：2024-02-02

申请人： Carl Zeiss Microscopy GmbH

发明人： Ramu Pradip

IPC分类号： H01J37/08 ,  H01J37/244

CPC分类号： H01J37/08 ,  H01J37/244 ,  H01J2237/24585 ,  H01J2237/24592

摘要： Operating an ion beam source comprises operating the ion beam source in a beam generation mode and operating the ion beam source in a decontamination mode. Operating in beam generation mode includes generating an ion beam from ions emitted from a tip. Operating in decontamination mode includes supplying power to a heating wire to raise the temperature of the heating wire to a decontamination temperature, measuring a change over time of a physical property indicating a temperature of the heating wire while the power is supplied to the heating wire, and displaying an indication based on the measured change over time of the physical property and/or storing a change value based on the measure change over time of the physical property. The ion beam source comprises the heating wire, a metal reservoir mechanically connected to the heating wire, and the tip mechanically connected to the metal reservoir.