公开(公告)号：US20020125208A1

公开(公告)日：2002-09-12

申请号：US10141740

申请日：2002-05-09

Applicant: DELPHI TECHNOLOGIES, INC.

Inventor： John Carl Christenson ,  Steven Edward Staller ,  John Emmett Freeman ,  Troy Allan Chase ,  Robert Lawrence Healton ,  David Boyd Rich

IPC: C23F001/00

CPC classification number: B81C1/0019 ,  B81B2201/0235 ,  B81C2201/014 ,  B81C2201/019

Abstract: A micro-electro-mechanical structure including a semiconductor layer mounted to an annular support structure via an isolation layer wherein the semiconductor layer is micromachined to form a suspended body having a plurality of suspension projections extending from the body to the rim and groups of integral projections extending toward but spaced from the rim between said suspension projections. Each projection in said groups has a base attached to the body and a tip proximate the rim. The structure includes a plurality of inward projections extending from and supported on the rim and toward the body. Each such projection has a base attached to the rim and a tip proximate the body; wherein the grouped projections and the inward projections are arranged in an interdigitated fashion to define a plurality of proximate projection pairs independent of the suspension elements such that a primary capacitive gap is defined between the projections of each projection pair. Also, a process is disclosed for fabricating the micro-electro-mechanical structure including the steps of removing a highly doped etch termination layer and thereafter etching through a lightly doped epitaxial layer to thereby define and release the structure.