公开(公告)号：US20160187215A1

公开(公告)日：2016-06-30

申请号：US14910005

申请日：2014-08-01

Applicant: DENSO CORPORATION

Inventor： Takahiro KAWANO ,  Takashi KATSUMATA ,  Hisanori YOKURA ,  Shoji OZOE ,  Hiroaki TANAKA

IPC: G01L9/00

CPC classification number: G01L9/0042 ,  G01L9/0054

Abstract: A dynamic quantity sensor includes a first substrate and a second substrate. The first substrate has one surface, another surface opposite to the one surface, and a depressed portion defining a thin portion. The second substrate has one surface attached to the first substrate and a recessed portion disposed corresponding to the depressed portion. At least a part of a first projection line obtained by projecting the recessed portion is disposed outside of a second projection line obtained by projecting a boundary line between side walls of the depressed portion and the thin portion. The thin portion disposed inside the periphery of the recessed portion provides a film portion which is displaceable corresponding to a physical quantity applied to the film portion, and a region sandwiched between the film portion and a portion connected to the periphery of the recessed portion provides a stress release region.

Abstract translation: 动态量传感器包括第一基板和第二基板。 第一基板具有一个表面，与一个表面相对的另一表面，以及限定薄部分的凹陷部分。 第二基板具有附接到第一基板的一个表面和对应于凹陷部分设置的凹部。 通过突出凹部获得的第一投影线的至少一部分设置在通过在凹部的侧壁和薄部之间突出边界线而获得的第二投影线之外。 设置在凹部的周围的薄壁部分提供可以对应于施加到薄膜部分的物理量移位的薄膜部分，并且夹在薄膜部分和连接到凹部的周边的部分之间的区域提供 应力释放区域。