公开(公告)号：US20190162949A1

公开(公告)日：2019-05-30

申请号：US16261904

申请日：2019-01-30

Applicant: DENSO CORPORATION

Inventor： Tetsuya ENOMOTO ,  Takashi KATSUMATA

IPC: G02B26/08 ,  G02B26/10 ,  H02N2/02 ,  H02N2/06

Abstract: A MEMS device includes a fixed portion fixed to a pedestal, a movable portion arranged inside the fixed portion and configured to be displaceable with respect to the fixed portion, a connecting portion that connects the fixed portion and the movable portion, a piezoelectric element disposed on at least one of the fixed portion or the connecting portion, and a detection portion that output a signal corresponding to a distortion of the movable portion. A voltage is applied to the piezoelectric element on the basis of the output signal of the detection portion thereby reducing the distortion transmitted from the fixed portion to the movable portion.

公开(公告)号：US20190064509A1

公开(公告)日：2019-02-28

申请号：US16080038

申请日：2017-01-12

Applicant: DENSO CORPORATION

Inventor： Koichi OYAMA ,  Takashi KATSUMATA ,  Tetsuya ENOMOTO ,  Yumi MARUYAMA

IPC: G02B26/10 ,  B81B3/00 ,  G02B26/08

Abstract: A variable focus mirror includes a base portion, a first piezoelectric element, a reflection surface portion, and a second piezoelectric element. The base portion has a plate shape with a recessed portion on a back surface. The first piezoelectric element is arranged on a front surface of the base portion where the recessed portion is arranged. The reflection surface portion is arranged on the first piezoelectric element. The reflection surface portion is arranged opposite to the base portion with respect to the first piezoelectric element. The second piezoelectric element is arranged on the front surface of the base portion. The second piezoelectric element covers the part of the base portion where the recessed portion is arranged and the part of the base portion outside the recessed portion. The second piezoelectric element is separated from the first piezoelectric element.

公开(公告)号：US20160187215A1

公开(公告)日：2016-06-30

申请号：US14910005

申请日：2014-08-01

Applicant: DENSO CORPORATION

Inventor： Takahiro KAWANO ,  Takashi KATSUMATA ,  Hisanori YOKURA ,  Shoji OZOE ,  Hiroaki TANAKA

IPC: G01L9/00

CPC classification number: G01L9/0042 ,  G01L9/0054

Abstract: A dynamic quantity sensor includes a first substrate and a second substrate. The first substrate has one surface, another surface opposite to the one surface, and a depressed portion defining a thin portion. The second substrate has one surface attached to the first substrate and a recessed portion disposed corresponding to the depressed portion. At least a part of a first projection line obtained by projecting the recessed portion is disposed outside of a second projection line obtained by projecting a boundary line between side walls of the depressed portion and the thin portion. The thin portion disposed inside the periphery of the recessed portion provides a film portion which is displaceable corresponding to a physical quantity applied to the film portion, and a region sandwiched between the film portion and a portion connected to the periphery of the recessed portion provides a stress release region.

Abstract translation: 动态量传感器包括第一基板和第二基板。 第一基板具有一个表面，与一个表面相对的另一表面，以及限定薄部分的凹陷部分。 第二基板具有附接到第一基板的一个表面和对应于凹陷部分设置的凹部。 通过突出凹部获得的第一投影线的至少一部分设置在通过在凹部的侧壁和薄部之间突出边界线而获得的第二投影线之外。 设置在凹部的周围的薄壁部分提供可以对应于施加到薄膜部分的物理量移位的薄膜部分，并且夹在薄膜部分和连接到凹部的周边的部分之间的区域提供 应力释放区域。

公开(公告)号：US20180045587A1

公开(公告)日：2018-02-15

申请号：US15549708

申请日：2016-04-08

Applicant: DENSO CORPORATION

Inventor： Rie TAGUCHI ,  Kentaro MIZUNO ,  Takashi KATSUMATA

IPC: G01L1/18

CPC classification number: G01L1/18 ,  G01L9/04 ,  H01L29/84

Abstract: A force detection device includes: a substrate that includes a power supply wire, a reference wire, a first output wire, a second output wire and first to fourth mesa gauges extending along a first direction; and a force transmission block connected to the substrate. A pair of the first and second mesa gauges and a pair of the third and fourth mesa gauges are connected in parallel to each other between the power supply wire and the reference wire. The first output wire is connected between the first and second mesa gauges. The second output wire is connected between the third and fourth mesa gauges. A contact area of the force transmission block with a first pair of the first and fourth mesa gauges is different from a contact area of the force transmission block with a second pair of the second and third mesa gauges.

公开(公告)号：US20180024014A1

公开(公告)日：2018-01-25

申请号：US15546729

申请日：2016-04-04

Applicant: DENSO CORPORATION

Inventor： Rie TAGUCHI ,  Kentaro MIZUNO ,  Takashi KATSUMATA

IPC: G01L1/18 ,  H01C10/10

CPC classification number: G01L1/18 ,  G01L1/205 ,  G01L1/2243 ,  G01L1/2275 ,  G01L9/0052 ,  H01C10/10

Abstract: A force detection device includes: a substrate; and a force transmission block. The substrate includes: a mesa gauge arranged on a principal plane of the substrate and providing a bridge circuit; a connection region arranged on the principal plane; and a sealing portion surrounding all around the mesa gauge and connected to the force transmission block. The mesa gauge includes: a first mesa gauge extending in a first direction; and a second mesa gauge extending in a second direction and spaced apart from the first mesa gauge. The connection region electrically connects the one end of the first mesa gauge and the one end of the second mesa gauge.

公开(公告)号：US20170102274A1

公开(公告)日：2017-04-13

申请号：US15128453

申请日：2015-03-24

Applicant: DENSO CORPORATION

Inventor： Kentaro MIZUNO ,  Rie TAGUCHI ,  Shoji HASHIMOTO ,  Yoshie OHIRA ,  Takashi KATSUMATA ,  Kouhei YAMAGUCHI

IPC: G01L1/18 ,  G01L9/06 ,  G01L9/00

CPC classification number: G01L1/18 ,  G01L9/0054 ,  G01L9/0055 ,  G01L9/06

Abstract: A force detection apparatus includes a substrate and a force transmission block. The substrate includes: a high-sensitive mesa gauge that is provided on a main surface, extends in a first direction to produce a relatively large change of an electric resistance in accordance with compressive stress, and includes a top surface; a low-sensitive mesa gauge that is provided on the main surface, extends in a second direction to produce a relatively small change of an electric resistance, and includes a top surface; and a mesa lead that is provided on the main surface, extends in a third direction, and includes a top surface. The force transmission block contacts the top surface of the high-sensitive mesa gauge and the top surface of the low-sensitive mesa gauge, and is non-contact with at least a part of the top surface of the mesa lead.

公开(公告)号：US20130239683A1

公开(公告)日：2013-09-19

申请号：US13765993

申请日：2013-02-13

Applicant: DENSO CORPORATION

Inventor： Takashi KATSUMATA

IPC: G01C19/5642

CPC classification number: G01C19/5642 ,  G01C19/574

Abstract: An angular velocity sensor includes a vibrator located along x-y plane specified by x direction and y direction that are orthogonal to each other; a substrate that is separated away from the vibrator along z direction perpendicular to the x-y plane; an anchor device extended from the substrate to the x-y plane in which the vibrator is located; a linkage beam device that links the anchor device to the vibrator, the linkage beam being able to twist about the y direction; an excitation portion that vibrates the vibrator along the z direction; and a detection portion that detects an angular velocity based on a displacement along the x direction of the vibrator. The vibrator includes a linkage region to link with the linkage beam device, and the linkage region becomes a wave node when the vibrator vibrates along the z direction.

Abstract translation: 角速度传感器包括沿x方向和y方向指定的振动器，其彼此正交; 沿垂直于x-y平面的z方向远离振动器分离的衬底; 锚固装置，其从所述基板延伸到所述振动器所在的x-y平面; 联动梁装置，其将锚定装置连接到振动器，所述联动梁能够围绕y方向扭转; 励磁部，其使振动体沿着z方向振动; 以及检测部，其基于沿着振动器的x方向的位移来检测角速度。 振动器包括与连杆装置连接的联动区域，当振动器沿z方向振动时，连动区域变为波形节点。