公开(公告)号：US11530955B2

公开(公告)日：2022-12-20

申请号：US17001132

申请日：2020-08-24

Applicant: Dalian University of Technology

Inventor： Daoman Han ,  Yongxin Liu ,  Fei Gao ,  Zigeng Liu ,  Zhenguo Jing ,  Younian Wang

IPC: G01K11/32 ,  G01J3/28 ,  G01K1/14

Abstract: The present invention discloses a device for measuring gas temperature in plasma, including: a vacuum chamber, a fiber optic temperature sensor, a quartz tube, a circulator, a spectrometer, a broadband light source and a computer. One end of the quartz tube is inserted into the vacuum chamber. The fiber optic temperature sensor is located in the plasma in the vacuum chamber and fixed to the quartz tube. The fiber optic temperature sensor is connected to the circulator by means of an optical fiber passing through the quartz tube. The circulator is connected to the broadband light source and the spectrometer through optical fibers, respectively. The spectrometer is electrically connected to the computer which is configured to read and record spectra collected by the spectrometer.

公开(公告)号：US20210072096A1

公开(公告)日：2021-03-11

申请号：US17001132

申请日：2020-08-24

Applicant: Dalian University of Technology

Inventor： Daoman Han ,  Yongxin Liu ,  Fei Gao ,  Zigeng Liu ,  Zhenguo Jing ,  Younian Wang

IPC: G01K11/32 ,  G01J3/28 ,  G01K1/14

Abstract: The present invention discloses a device for measuring gas temperature in plasma, including: a vacuum chamber, a fiber optic temperature sensor, a quartz tube, a circulator, a spectrometer, a broadband light source and a computer. One end of the quartz tube is inserted into the vacuum chamber. The fiber optic temperature sensor is located in the plasma in the vacuum chamber and fixed to the quartz tube. The fiber optic temperature sensor is connected to the circulator by means of an optical fiber passing through the quartz tube. The circulator is connected to the broadband light source and the spectrometer through optical fibers, respectively. The spectrometer is electrically connected to the computer which is configured to read and record spectra collected by the spectrometer.