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公开(公告)号：US20210072096A1
公开(公告)日：2021-03-11
申请号：US17001132
申请日：2020-08-24
Applicant: Dalian University of Technology
Inventor： Daoman Han , Yongxin Liu , Fei Gao , Zigeng Liu , Zhenguo Jing , Younian Wang
Abstract: The present invention discloses a device for measuring gas temperature in plasma, including: a vacuum chamber, a fiber optic temperature sensor, a quartz tube, a circulator, a spectrometer, a broadband light source and a computer. One end of the quartz tube is inserted into the vacuum chamber. The fiber optic temperature sensor is located in the plasma in the vacuum chamber and fixed to the quartz tube. The fiber optic temperature sensor is connected to the circulator by means of an optical fiber passing through the quartz tube. The circulator is connected to the broadband light source and the spectrometer through optical fibers, respectively. The spectrometer is electrically connected to the computer which is configured to read and record spectra collected by the spectrometer.
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公开(公告)号：US11324104B2
公开(公告)日：2022-05-03
申请号：US16516484
申请日：2019-07-19
Applicant: Dalian University of Technology
Inventor： Kai Zhao , Yongxin Liu , Younian Wang
Abstract: The present invention discloses a magnetic probe device. The magnetic probe device includes a magnetic probe body and a signal processing circuit, and an output end of the magnetic probe body is connected with an input end of the signal processing circuit; the signal processing circuit includes a first capacitor, a second capacitor, a Faraday shield and a step-up transformer, and the Faraday shield is fixedly arranged between a primary winding and a secondary winding of the step-up transformer; a center tap is arranged at the primary winding of the step-up transformer, and the center tap is grounded; and a first end of the primary winding is in series connection with the first capacitor, and a second end of the primary winding is in series connection with the second capacitor. The magnetic probe device provided by the present invention can improve the signal-to-noise ratio of a magnetic probe and the measurement accuracy of the magnetic field in plasma.
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公开(公告)号：US11758641B2
公开(公告)日：2023-09-12
申请号：US17228124
申请日：2021-04-12
Applicant: Dalian University of Technology
Inventor： Kai Zhao , Zixuan Su , Yongxin Liu , Younian Wang
IPC: H05H1/46
CPC classification number: H05H1/4645
Abstract: The present disclosure relates to a power supply system for improving plasma uniformity and a method thereof, wherein the power supply system includes a signal generating device, a first electrode and a second electrode. The signal generator is respectively connected with a plurality of signal processing circuits and is used for generating a plurality of initial signals at different frequencies; the signal processing circuits are used for processing the initial signals at corresponding frequencies; the plurality of signal processing circuits are all connected with the first electrode; and the initial signals are processed by the signal processing circuits and then act on the plasma through the first electrode. The present disclosure may effectively process signals in different power supplies, improve the stability of plasma discharge, reduce the impact of the coupling effect between different power supplies, and realize the independent control of ion flux and ion energy.
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公开(公告)号：US11530955B2
公开(公告)日：2022-12-20
申请号：US17001132
申请日：2020-08-24
Applicant: Dalian University of Technology
Inventor： Daoman Han , Yongxin Liu , Fei Gao , Zigeng Liu , Zhenguo Jing , Younian Wang
Abstract: The present invention discloses a device for measuring gas temperature in plasma, including: a vacuum chamber, a fiber optic temperature sensor, a quartz tube, a circulator, a spectrometer, a broadband light source and a computer. One end of the quartz tube is inserted into the vacuum chamber. The fiber optic temperature sensor is located in the plasma in the vacuum chamber and fixed to the quartz tube. The fiber optic temperature sensor is connected to the circulator by means of an optical fiber passing through the quartz tube. The circulator is connected to the broadband light source and the spectrometer through optical fibers, respectively. The spectrometer is electrically connected to the computer which is configured to read and record spectra collected by the spectrometer.
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