Systems and methods of phase diversity wavefront sensing
    2.
    发明授权
    Systems and methods of phase diversity wavefront sensing 有权
    相位分集波前感测的系统和方法

    公开(公告)号:US08517535B2

    公开(公告)日:2013-08-27

    申请号:US13299466

    申请日:2011-11-18

    IPC分类号: A61B3/10 A61B3/00 G02B5/18

    摘要: A phase diversity wavefront sensor includes an optical system including at least one optical element for receiving a light beam; a diffractive optical element having a diffractive pattern defining a filter function, the diffractive optical element being arranged to produce, in conjunction with the optical system, images from the light beam associated with at least two diffraction orders; and a detector for detecting the images and outputting image data corresponding to the detected images. In one embodiment, the optical system, diffractive optical element, and detector are arranged to provide telecentric, pupil plane images of the light beam. A processor receives the image data from the detector, and executes a Gerchberg-Saxton phase retrieval algorithm to measure the wavefront of the light beam.

    摘要翻译: 相位分集波前传感器包括光学系统,该光学系统包括用于接收光束的至少一个光学元件; 具有限定滤光器功能的衍射图案的衍射光学元件,所述衍射光学元件布置成与所述光学系统结合产生与至少两个衍射级相关联的光束的图像; 以及用于检测图像并输出与检测到的图像相对应的图像数据的检测器。 在一个实施例中,光学系统,衍射光学元件和检测器被布置成提供光束的远心光瞳平面图像。 处理器从检测器接收图像数据,并且执行Gerchberg-Saxton相位检索算法来测量光束的波前。

    Systems and methods for measuring surface shape
    3.
    发明授权
    Systems and methods for measuring surface shape 有权
    用于测量表面形状的系统和方法

    公开(公告)号:US08260024B2

    公开(公告)日:2012-09-04

    申请号:US13356131

    申请日:2012-01-23

    IPC分类号: G06K9/00

    摘要: A system for determining a surface shape of a test object includes a pattern having a plurality of first elements dispose about a central axis and defining an aperture containing the central axis. The first elements includes a plurality of common elements having a common form and a reference element having a reference form that is different than the common form. The system further comprises a detector array and an optical system. The optical system is adapted to provide an image of the first elements when light reflects off a surface of a test object, passes through the aperture, and is received by the detector array. The reference form may be configured to facilitate an association between the common elements and the spot images of the common elements.

    摘要翻译: 用于确定测试对象的表面形状的系统包括具有围绕中心轴布置并且限定包含中心轴线的孔的多个第一元件的图案。 第一元件包括具有共同形式的多个公共元件和具有不同于通用形式的参考形式的参考元件。 该系统还包括检测器阵列和光学系统。 当光从测试对象的表面反射出来时,该光学系统适于提供第一元件的图像,通过该孔并由检测器阵列接收。 参考表格可以被配置为便于公共元素与公共元素的斑点图像之间的关联。