MEASURING DEVICE FOR INTERFEROMETRIC DETERMINATION OF A SHAPE OF AN OPTICAL SURFACE

    公开(公告)号:US20190154427A1

    公开(公告)日:2019-05-23

    申请号:US16251703

    申请日:2019-01-18

    发明人: Jochen HETZLER

    IPC分类号: G01B9/02 G01B11/24 G01M11/02

    摘要: A measurement apparatus (10) for determining a shape of an optical surface. An illumination module (16) produces an illumination wave (34), an interferometer (18) splits the wave into a test wave (50), which is directed onto the optical surface, and a reference wave (52). The relative tilt between the waves produces a multi-fringe interference pattern (66) in a detection plane (62) of the interferometer when the waves are superposed. A pupil plane (28) of the illumination module is arranged in a Fourier plane of the detection plane and the illumination module is configured to produce the illumination wave so that the intensity distribution thereof in the pupil plane includes at least one spatially isolated and contiguous surface region (38) such that a rectangle (74) with the smallest possible area fitted to the surface region or the totality of surface regions has an aspect ratio of at least 1.5:1.

    Apparatus and method for evaluation of optical elements

    公开(公告)号:US09958355B2

    公开(公告)日:2018-05-01

    申请号:US15154454

    申请日:2016-05-13

    申请人: LUMETRICS, INC.

    IPC分类号: G01B9/00 G01M11/02

    摘要: An apparatus for measuring the optical performance characteristics and dimensions of an optical element comprising a low coherence interferometer and a Shack-Hartmann wavefront sensor comprising a light source, a plurality of lenslets, and a sensor array is disclosed. The low coherence interferometer is configured to direct a measurement beam along a central axis of the optical element, and to measure the thickness of the center of the optical element. The light source of the Shack-Hartmann wavefront sensor is configured to emit a waveform directed parallel to and surrounding the measurement beam of the interferometer, through the plurality of lenslets, and to the sensor array. A method for measuring the optical performance characteristics and dimensions of a lens using the apparatus is also disclosed.

    Optical evaluation of lenses and lens molds

    公开(公告)号:US09599534B2

    公开(公告)日:2017-03-21

    申请号:US14825317

    申请日:2015-08-13

    申请人: Zygo Corporation

    IPC分类号: G01B9/00 G01M11/02

    摘要: A method for determining information about an object including a curved portion and a planar portion, the curved portion having a first curved surface having an apex and defining an axis of the object, includes: directing measurement light to the object; detecting measurement light reflected from the first curved surface of the curved portion; detecting measurement light reflected from at least one other surface of the object; and determining, based on the detected light, information about the apex of the first curved surface of the curved portion.

    Wavefront measurement method, shape measurement method, optical element manufacturing method, optical apparatus manufacturing method, program, and wavefront measurement apparatus
    9.
    发明授权
    Wavefront measurement method, shape measurement method, optical element manufacturing method, optical apparatus manufacturing method, program, and wavefront measurement apparatus 有权
    波前测量方法,形状测量方法,光学元件制造方法,光学装置制造方法,程序和波前测量装置

    公开(公告)号:US09574967B2

    公开(公告)日:2017-02-21

    申请号:US14446150

    申请日:2014-07-29

    发明人: Atsushi Maeda

    IPC分类号: G01M11/02 G01J9/00

    摘要: A wavefront measurement method includes the steps of causing object light to be incident on a Shack-Hartmann sensor, capturing a first spot image under image pickup conditions, calculating data of first spot positions that correspond to the first spot image, calculating second spot positions by simulating a second spot image on the basis of the image pickup condition and information of a travelling direction of diffracted light generated when the object light passes through the microlenses, and reducing detection errors of the spot positions by correcting the data of the first spot positions on the basis of data of the second spot positions including data of a detection error due to the diffracted light.

    摘要翻译: 波前测量方法包括以下步骤:使物体光入射到Shack-Hartmann传感器上,在摄像条件下拍摄第一斑点图像,计算与第一斑点图像对应的第一斑点位置的数据, 基于图像拾取条件和当物体光通过微透镜时产生的衍射光的行进方向的信息来模拟第二斑点图像,并且通过校正第一斑点位置的数据来减少斑点位置的检测误差 第二点位置的数据的基础包括由衍射光引起的检测误差的数据。

    ECCENTRICITY AMOUNT OBTAINMENT METHOD AND ECCENTRICITY AMOUNT OBTAINMENT DEVICE
    10.
    发明申请
    ECCENTRICITY AMOUNT OBTAINMENT METHOD AND ECCENTRICITY AMOUNT OBTAINMENT DEVICE 有权
    偏差量检测方法和偏差量检测装置

    公开(公告)号:US20160320263A1

    公开(公告)日:2016-11-03

    申请号:US15207830

    申请日:2016-07-12

    发明人: Kanato ADACHI

    IPC分类号: G01M11/08

    摘要: According to one aspect, an eccentricity amount obtainment method is a method of obtaining shift eccentricity amounts of lens frames through in a lens barrel that includes the plurality of lens frames having lens cells, the eccentricity amount obtainment method including arranging, in each of the lens cells, a flat plate member on which an index is formed and which has optical transparency and arranging the lens frames in the lens barrel in a prescribed order so as to assemble an assembly, a emitting illumination light to the flat plate members, obtaining pieces of information related to positions of the indexes formed on the flat plate members, and obtaining, as the shift eccentricity amounts of the lens frames, the positional displacement amounts with respect to the indexes formed on the flat plate members with respect to an arbitrary position.

    摘要翻译: 根据一个方面,偏心量获得方法是通过在包括具有透镜单元的多个透镜框的透镜镜筒中获得透镜框的偏移偏心量的方法,所述偏心量获取方法包括在每个透镜 单元,其上形成有折射率的平板构件,其具有光学透明性,并且以规定的顺序将透镜框架布置在镜筒中,以组装组件,向平板构件发射照明光,获得片 关于形成在平板部件上的索引的位置的信息,并且获得相对于在平板部件上相对于任意位置形成的索引的位置偏移量作为透镜框的偏移偏心量。