公开(公告)号：US20090255362A1

公开(公告)日：2009-10-15

申请号：US12103505

申请日：2008-04-15

申请人： David Barker ,  Robert T. LoBianco ,  Bhavesh Amin

发明人： David Barker ,  Robert T. LoBianco ,  Bhavesh Amin

IPC分类号： B25J18/00

CPC分类号： B25J19/0058 ,  H01L21/67742 ,  H01L21/67766 ,  Y10T74/20305

摘要： A robot with improved cleanliness for use in a clean environment is disclosed, having a uniform flow through the open interface between the clean environment and the interior of the robot housing, passing the particle generation area to an exhaust port, keeping the particles from the clean environment. The uniform flow reduces or eliminates the back flow, and further allows the scalability of the open interface to prevent particles generated from moving mechanisms within the robot housing to contaminate the clean environment. The uniform flow can be established by designing the flow dynamic, centering the exhaust port, or by restricting the flow along the elongated slot, for example, by uniformly restricting the flow along the elongated slot, or by implementing a restrictor along the elongated slot.

摘要翻译： 公开了一种在清洁环境中使用的具有改进的清洁度的机器人，具有通过清洁环境和机器人外壳内部之间的开放界面的均匀流动，将颗粒产生区域传递到排气口，从而保持颗粒免受干扰 环境。 均匀流量减少或消除了回流，并且还允许开放界面的可扩展性来防止机器人壳体内移动机构产生的颗粒污染清洁环境。 可以通过设计流动动态，排气口定心，或通过限制沿细长槽的流动，例如通过均匀地限制沿着细长槽的流动，或通过沿细长槽实现限流器来建立均匀流动。

公开(公告)号：US08757026B2

公开(公告)日：2014-06-24

申请号：US12103505

申请日：2008-04-15

申请人： David Barker ,  Robert T. LoBianco ,  Bhavesh Amin

发明人： David Barker ,  Robert T. LoBianco ,  Bhavesh Amin

IPC分类号： B25J17/00

CPC分类号： B25J19/0058 ,  H01L21/67742 ,  H01L21/67766 ,  Y10T74/20305

摘要： A robot with improved cleanliness for use in a clean environment is disclosed, having a uniform flow through the open interface between the clean environment and the interior of the robot housing, passing the particle generation area to an exhaust port, keeping the particles from the clean environment. The uniform flow reduces or eliminates the back flow, and further allows the scalability of the open interface to prevent particles generated from moving mechanisms within the robot housing to contaminate the clean environment. The uniform flow can be established by designing the flow dynamic, centering the exhaust port, or by restricting the flow along the elongated slot, for example, by uniformly restricting the flow along the elongated slot, or by implementing a restrictor along the elongated slot.

摘要翻译： 公开了一种在清洁环境中使用的具有改进的清洁度的机器人，具有通过清洁环境和机器人外壳内部之间的开放界面的均匀流动，将颗粒产生区域传递到排气口，从而保持颗粒免受干扰 环境。 均匀流量减少或消除了回流，并且还允许开放界面的可扩展性来防止机器人壳体内移动机构产生的颗粒污染清洁环境。 可以通过设计流动动态，排气口定心，或通过限制沿细长槽的流动，例如通过均匀地限制沿着细长槽的流动，或通过沿细长槽实现限流器来建立均匀流动。