公开(公告)号：US10078014B2

公开(公告)日：2018-09-18

申请号：US14967081

申请日：2015-12-11

Applicant: Daylight Solutions, Inc.

Inventor： Miles James Weida ,  Justin Kane ,  Daniel Forster ,  Jeremy Rowlette

IPC: H01L25/00 ,  G01J5/08 ,  G01J5/02 ,  G01J5/20 ,  G01J5/00 ,  G01J3/18

CPC classification number: G01J5/0896 ,  G01J3/18 ,  G01J5/026 ,  G01J5/084 ,  G01J2005/0077 ,  G01J2005/202

Abstract: An assembly (12) for rapid thermal data acquisition of a sample (10) includes a laser source (14), a light sensing device (26), and a control system (28). The laser source (14) emits a laser beam (16) that is directed at the sample (10), the laser beam (16) including a plurality of pulses (233). The light sensing device (26) senses mid-infrared light from the sample (10), the light sensing device (26) including a pixel array (348). The control system (28) controls the light sensing device (26) to capture a plurality of sequential readouts (402) from the pixel array (348) with a substantially steady periodic readout acquisition rate 405. The control system (28) can generate a spectral cube (13) using information from the readouts (402).

公开(公告)号：US20160169747A1

公开(公告)日：2016-06-16

申请号：US14967081

申请日：2015-12-11

Applicant: Daylight Solutions, Inc.

Inventor： Miles James Weida ,  Justin Kane ,  Daniel Forster ,  Jeremy Rowlette

IPC: G01J5/22 ,  G01J5/08

CPC classification number: G01J5/0896 ,  G01J3/18 ,  G01J5/026 ,  G01J5/084 ,  G01J2005/0077 ,  G01J2005/202

Abstract: An assembly (12) for rapid thermal data acquisition of a sample (10) includes a laser source (14), a light sensing device (26), and a control system (28). The laser source (14) emits a laser beam (16) that is directed at the sample (10), the laser beam (16) including a plurality of pulses (233). The light sensing device (26) senses mid-infrared light from the sample (10), the light sensing device (26) including a pixel array (348). The control system (28) controls the light sensing device (26) to capture a plurality of sequential readouts (402) from the pixel array (348) with a substantially steady periodic readout acquisition rate 405. The control system (28) can generate a spectral cube (13) using information from the readouts (402).

Abstract translation: 用于样品（10）的快速热数据采集的组件（12）包括激光源（14），光感测装置（26）和控制系统（28）。 激光源（14）发射指向样品（10）的激光束（16），激光束（16）包括多个脉冲（233）。 光检测装置（26）感测来自样品（10）的中红外光，光感测装置（26）包括像素阵列（348）。 控制系统（28）控制光感测装置（26）以基本稳定的周期性读出获取速率405从像素阵列（348）捕获多个顺序读出（402）。控制系统（28）可以产生 光谱立方体（13）使用来自读出（402）的信息。