公开(公告)号：US07488082B2

公开(公告)日：2009-02-10

申请号：US11609882

申请日：2006-12-12

申请人： Hye Young Kim ,  Dong Woo Gim ,  Jin Young Sohn ,  Gyoung Il Cho ,  Cheong Soo Seo

发明人： Hye Young Kim ,  Dong Woo Gim ,  Jin Young Sohn ,  Gyoung Il Cho ,  Cheong Soo Seo

IPC分类号： G02B5/08 ,  G02B7/182 ,  G02B26/00

CPC分类号： G02B26/0841 ,  G09G3/346 ,  G09G2310/0221

摘要： This invention provides a discretely controlled micromirror array device comprising a plurality of micromirrors. The discretely controlled micromirror array device forms multiple surface profiles, wherein the rotational and translational motion of each micromirror is discretely controlled by selectively activating different groups of segmented electrodes using a control circuitry. The discretely controlled micromirror array device is compatible with known semiconductor electronics technologies and provides structural stability and efficiency in motion.

摘要翻译： 本发明提供了包括多个微镜的离散控制的微镜阵列器件。 离散控制的微镜阵列器件形成多个表面轮廓，其中每个微反射镜的旋转和平移运动通过使用控制电路选择性地激活不同的分段电极组来离散地控制。 离散控制的微镜阵列器件与已知的半导体电子技术兼容，并提供结构稳定性和运动效率。

公开(公告)号：US07535618B2

公开(公告)日：2009-05-19

申请号：US11685119

申请日：2007-03-12

申请人： Hye Young Kim ,  Dong Woo Gim ,  Jin Young Sohn ,  Gyoung Il Cho ,  Cheong Soo Seo

发明人： Hye Young Kim ,  Dong Woo Gim ,  Jin Young Sohn ,  Gyoung Il Cho ,  Cheong Soo Seo

IPC分类号： G02B26/00

CPC分类号： G02B26/0841 ,  G02B26/085 ,  G02B26/0866

摘要： A discretely controlled micromirror device provides multiple motions of a micromirror using stepper plate and micromirror bottom support. The discretely controlled micromirror device can be controlled in a low driving voltage. Also, simple motion control is applied by digital controlling and only single voltage is needed for driving the micromirror motion.

摘要翻译： 离散控制的微镜器件使用步进板和微镜底部支撑提供微镜的多个运动。 离散控制的微镜器件可以被控制在低驱动电压。 此外，通过数字控制应用简单的运动控制，并且仅需要单个电压来驱动微镜运动。

公开(公告)号：US20080225369A1

公开(公告)日：2008-09-18

申请号：US11685119

申请日：2007-03-12

申请人： Hye Young Kim ,  Dong Woo Gim ,  Jin Young Sohn ,  Gyoung Il Cho ,  Cheong Soo Seo

发明人： Hye Young Kim ,  Dong Woo Gim ,  Jin Young Sohn ,  Gyoung Il Cho ,  Cheong Soo Seo

IPC分类号： G02B26/08

CPC分类号： G02B26/0841 ,  G02B26/085 ,  G02B26/0866

摘要： A discretely controlled micromirror device provides multiple motions of a micromirror using stepper plate and micromirror bottom support. The discretely controlled micromirror device can be controlled in a low driving voltage. Also, simple motion control is applied by digital controlling and only single voltage is needed for driving the micromirror motion.

摘要翻译： 离散控制的微镜器件使用步进板和微镜底部支撑提供微镜的多个运动。 离散控制的微镜器件可以被控制在低驱动电压。 此外，通过数字控制应用简单的运动控制，并且仅需要单个电压来驱动微镜运动。

公开(公告)号：US07365899B2

公开(公告)日：2008-04-29

申请号：US11463875

申请日：2006-08-10

申请人： Dong Woo Gim ,  Gyoung Il Cho ,  Jin Young Sohn ,  Cheong Soo Seo

发明人： Dong Woo Gim ,  Gyoung Il Cho ,  Jin Young Sohn ,  Cheong Soo Seo

IPC分类号： G02B26/00

CPC分类号： G02B26/0841 ,  G02B26/085

摘要： The present invention discloses a micromirror device with multi-axis rotational and translational motion. Newly introduced structure of the top electrode plate improves structural stability, flexibility, and more motion efficiency of the micromirror device. The invention also improves controllability of micromirror motion by designing the appropriate flexible structure to generate desired motion. With side-by-side arrangement of the micromirror devices, the micromirror devices are built as an array to form a micromirror array lens.

摘要翻译： 本发明公开了一种具有多轴旋转和平移运动的微镜装置。 顶部电极板的新引入结构提高了微镜装置的结构稳定性，灵活性和更高的运动效率。 本发明还通过设计适当的柔性结构以产生所需运动来提高微镜运动的可控性。 利用微镜器件的并排布置，微镜器件被构建为阵列以形成微镜阵列透镜。

公开(公告)号：US20080239442A1

公开(公告)日：2008-10-02

申请号：US11693698

申请日：2007-03-29

申请人： Dong Woo Gim ,  Jin Young Sohn ,  Gyoung Il Cho ,  Cheong Soo Seo

发明人： Dong Woo Gim ,  Jin Young Sohn ,  Gyoung Il Cho ,  Cheong Soo Seo

IPC分类号： G02B26/06 ,  G02B26/08

CPC分类号： G02B26/0841 ,  G02B26/06

摘要： The present invention discloses an array of micromirrors with non-fixed underlying structures which can be oriented to have principal rotational axis with no structural and mechanical interference and with no electrical conflict. The micromirror array in the present invention can reproduce various surfaces including spherical, aspherical (e.g. parabolic, hyperbolic, elliptical, etc.), anamorphic, other than rotational symmetric profiles. With the newly introduced non-fixed underlying structure, the present invention makes possible for a micromirror array to generate a desired optical surface profile by simple motion controls and to improve structural stability, simplicity, flexibility, and efficiency in motion and motion control.

摘要翻译： 本发明公开了一种具有非固定底层结构的微镜阵列，其可以被定向成具有不具有结构和机械干涉并且没有电冲突的主旋转轴线。 本发明中的微镜阵列可以再现除了旋转对称轮廓之外的包括球形，非球面（例如抛物线，双曲线，椭圆形等），变形的各种表面。 利用新引入的非固定底层结构，本发明使得微镜阵列能够通过简单的运动控制产生期望的光学表面轮廓并且提高运动和运动控制的结构稳定性，简单性，灵活性和效率。

公开(公告)号：US07605964B2

公开(公告)日：2009-10-20

申请号：US11693698

申请日：2007-03-29

申请人： Dong Woo Gim ,  Jin Young Sohn ,  Gyoung Il Cho ,  Cheong Soo Seo

发明人： Dong Woo Gim ,  Jin Young Sohn ,  Gyoung Il Cho ,  Cheong Soo Seo

IPC分类号： G02B26/08

CPC分类号： G02B26/0841 ,  G02B26/06

摘要： The present invention discloses an array of micromirrors with non-fixed underlying structures which can be oriented to have principal rotational axis with no structural and mechanical interference and with no electrical conflict. The micromirror array in the present invention can reproduce various surfaces including spherical, aspherical (e.g. parabolic, hyperbolic, elliptical, etc.), anamorphic, other than rotational symmetric profiles. With the newly introduced non-fixed underlying structure, the present invention makes possible for a micromirror array to generate a desired optical surface profile by simple motion controls and to improve structural stability, simplicity, flexibility, and efficiency in motion and motion control.

摘要翻译： 本发明公开了一种具有非固定底层结构的微镜阵列，其可以被定向成具有不具有结构和机械干涉并且没有电冲突的主旋转轴线。 本发明中的微镜阵列可以再现除了旋转对称轮廓之外的包括球形，非球面（例如抛物线，双曲线，椭圆形等），变形的各种表面。 利用新引入的非固定底层结构，本发明使得微镜阵列能够通过简单的运动控制产生期望的光学表面轮廓并且提高运动和运动控制的结构稳定性，简单性，灵活性和效率。

公开(公告)号：US20080137173A1

公开(公告)日：2008-06-12

申请号：US11609882

申请日：2006-12-12

申请人： Hye Young Kim ,  Dong Woo Gim ,  Jin Young Sohn ,  Gyoung Il Cho ,  Cheong Soo Seo

发明人： Hye Young Kim ,  Dong Woo Gim ,  Jin Young Sohn ,  Gyoung Il Cho ,  Cheong Soo Seo

IPC分类号： G02B26/00

CPC分类号： G02B26/0841 ,  G09G3/346 ,  G09G2310/0221

摘要： This invention provides a discretely controlled micromirror array device comprising a plurality of micromirrors. The discretely controlled micromirror array device forms multiple surface profiles, wherein the rotational and translational motion of each micromirror is discretely controlled by selectively activating different groups of segmented electrodes using a control circuitry. The discretely controlled micromirror array device is compatible with known semiconductor electronics technologies and provides structural stability and efficiency in motion.

摘要翻译： 本发明提供了包括多个微镜的离散控制的微镜阵列器件。 离散控制的微镜阵列器件形成多个表面轮廓，其中每个微反射镜的旋转和平移运动通过使用控制电路选择性地激活不同组的分段电极来离散地控制。 离散控制的微镜阵列器件与已知的半导体电子技术兼容，并提供结构稳定性和运动效率。

公开(公告)号：US07589885B2

公开(公告)日：2009-09-15

申请号：US11534620

申请日：2006-09-22

申请人： Jin Young Sohn ,  Gyoung Il Cho ,  Cheong Soo Seo

发明人： Jin Young Sohn ,  Gyoung Il Cho ,  Cheong Soo Seo

IPC分类号： G02B26/00 ,  G02B7/182 ,  G02F1/00

CPC分类号： G02B26/0841

摘要： The present invention provides an optical micromirror device and their array device and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances, oxidation, degradation, acid, base, and galvanic corrosion of the micro-mechanical structures. Also the new coating structure enhances the performance of the micromirror array device by reducing degradation of the reflectivity of the metal layer, by providing anti-reflection in the optically non-effective area, and by protecting the micro-mechanical structures.

摘要翻译： 本发明提供了一种光学微镜器件及其阵列器件及其制造方法。 通过引入具有高反射金属层的次涂层和涂层，微镜的反射层被保护免受环境的影响，微机械结构的氧化，降解，酸，碱和电偶腐蚀。 此外，新的涂层结构通过减少金属层的反射率的降低，通过在光学非有效区域中提供抗反射以及通过保护微机械结构来增强微镜阵列器件的性能。

公开(公告)号：US08622557B2

公开(公告)日：2014-01-07

申请号：US12124111

申请日：2008-05-20

申请人： Gyoung Il Cho ,  Jin Young Sohn ,  Hye Young Kim ,  Cheong Soo Seo

发明人： Gyoung Il Cho ,  Jin Young Sohn ,  Hye Young Kim ,  Cheong Soo Seo

IPC分类号： G02B5/08 ,  G02B7/182

CPC分类号： G02B26/0833

摘要： A Micromirror Array Lens with self-tilted micromirrors comprising a plurality of self-tilted micromirrors and configured to form a designed optical surface profile by self-tilted micromirrors. Each self-tilted micromirror comprises a substrate, at least one stiction plate configured to be attracted to the substrate by adhesion force, a micromirror plate having a reflective surface, coupled to the stiction plate elastically and configured to have a required motion when the stiction plate is attracted to the substrate, and at least one pivot structure disposed between the substrate and the micromirror plate and configured to provide a tilting point or area for the motion of the micromirror plate. The designed optical surface profile determines the required motion of the micromirror plate and a surface profile shape memory is built in the structure of the micro-mechanical elements of the self-tilted micromirrors so that each micromirror plate has the required motion.

摘要翻译： 一种具有自倾斜微镜的微镜阵列透镜，包括多个自倾斜微镜，并且被配置为通过自倾斜微镜形成设计的光学表面轮廓。 每个自倾斜微反射镜包括基底，至少一个固定板被配置成通过粘附力被吸引到基底上，具有反射表面的微镜板，弹性地耦合到该静摩擦板，并被构造成当静电板 被吸引到基板，以及设置在基板和微反射板之间的至少一个枢轴结构，并且构造成提供用于微镜板的运动的倾斜点或区域。 设计的光学表面轮廓确定微镜板的所需运动，并且表面轮廓形状存储器内置在自倾斜微镜的微机械元件的结构中，使得每个微镜板具有所需的运动。

公开(公告)号：US20090237783A1

公开(公告)日：2009-09-24

申请号：US12050918

申请日：2008-03-18

申请人： Hye Young Kim ,  Jin Young Sohn ,  Gyoung Il Cho ,  Cheong Soo Seo

发明人： Hye Young Kim ,  Jin Young Sohn ,  Gyoung Il Cho ,  Cheong Soo Seo

IPC分类号： G02B23/02 ,  G02B5/09

CPC分类号： G02B23/12 ,  G02B5/08 ,  G02B23/00 ,  G02B23/02 ,  G02B26/0833

摘要： The binoculars of the present invention comprise two optical units; one optical unit for each eye. Each optical unit comprises a first reflective lens element and a second reflective lens element, wherein at least one of the reflective lens elements is a Micromirror Array Lens. The binoculars of the present invention provide focusing and/or zoom functions without or with minimal macroscopic mechanical lens movement.

摘要翻译： 本发明的双筒望远镜包括两个光学单元; 每个眼睛一个光学单元。 每个光学单元包括第一反射透镜元件和第二反射透镜元件，其中至少一个反射透镜元件是微镜阵列透镜。 本发明的双筒望远镜提供聚焦和/或缩放功能，而不具有或具有最小的宏观机械透镜运动。