公开(公告)号：US20230151490A1

公开(公告)日：2023-05-18

申请号：US17983907

申请日：2022-11-09

Applicant: ENTEGRIS, INC.

Inventor： Michael Addorisio ,  David McCrimmon ,  Virendra Warke ,  Devon Nichole Dion ,  Benjamin Schooler

IPC: C23C16/455 ,  B29C64/153 ,  B29C64/268

CPC classification number: C23C16/45559 ,  C23C16/45563 ,  B29C64/153 ,  B29C64/268 ,  B33Y10/00

Abstract: Described are directional gas diffuser devices and housing components thereof; systems that include the gas diffuser devices; methods of using the gas diffuser devices; and methods of manufacturing gas diffuser devices.