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公开(公告)号：US20210013000A1
公开(公告)日：2021-01-14
申请号：US16923724
申请日：2020-07-08
Applicant: ENTEGRIS, INC.
Inventor： Troy SCOGGINS , Rex G. SHEPPARD , Abuagela H. RASHED , Amelia H.C. HART
IPC: H01J37/30 , H01J37/317 , H01J37/18
Abstract: Described are porous protective liners for use in a vacuum chamber, the liners being made of inorganic carbonaceous material and having a porous surface, preferably with the pores being of an open-pore structure.
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