公开(公告)号：US20240062988A1

公开(公告)日：2024-02-22

申请号：US17976344

申请日：2022-10-28

Applicant: East China University of Science and Technology

Inventor： Yabin YAN ,  Fuzhen XUAN ,  Ting SU

IPC: H01J37/21 ,  G06T7/70 ,  H01J37/20

CPC classification number: H01J37/21 ,  G06T7/70 ,  H01J37/20

Abstract: The present disclosure provides a machine vision-based automatic focusing and automatic centering method and system, which belongs to the technical field of machine vision-based automatic control. An object stage is controlled to move in an imaging distance range of an electron microscope, and images scanned by the electron microscope when the object stage is at different imaging distances are acquired. The image definition of an object stage image is calculated according to a gray-scale value of each pixel in the object stage image, the imaging position when an image definition value is the maximum is determined, and the object stage is controlled to move to the position, so as to realize machine vision-based accurate focusing. After the accurate focusing is completed, the images that can clearly reflect the arrangement relationship between an indenter and a sample on the object stage are acquired by the electron microscope, and a midline of an indenter area and a midline of a sample area are aligned, so as to realize machine vision-based accurate centering, which avoids the problems of low efficiency and poor accuracy in manual focusing and centering, and improves the focusing and centering efficiency.