公开(公告)号：US20130305519A1

公开(公告)日：2013-11-21

申请号：US13978502

申请日：2012-01-13

Applicant: Edin Sarajlic

Inventor： Edin Sarajlic

IPC: G01R3/00

CPC classification number: G01R3/00 ,  B01L3/502707 ,  B81B2201/057 ,  B81B2203/0118 ,  B81B2203/0338 ,  B81C1/00119 ,  B81C2201/0109 ,  Y10T29/49002

Abstract: The present invention relates to a method of manufacturing a probe comprising a cantilever with a conduit. According to the invention, an etchant window is provided in a layer covering an elongated sacrificial conduit core that is to form the conduit. This allows for an etching process where the elongated sacrificial conduit core is etched away before all material of a substrate is etched away, the remaining material of the substrate material making the probe stronger without being in the way during use of the probe.

Abstract translation: 本发明涉及一种制造探针的方法，该探针包括具有导管的悬臂。 根据本发明，在覆盖要形成导管的细长牺牲导管芯的层中提供蚀刻剂窗口。 这允许蚀刻工艺，其中在衬底的所有材料被蚀刻掉之前，细长的牺牲导管芯被蚀刻掉，使衬底材料的剩余材料在探针的使用期间不会妨碍探针而不会妨碍。

公开(公告)号：US09086431B2

公开(公告)日：2015-07-21

申请号：US13978502

申请日：2012-01-13

Applicant: Edin Sarajlic

Inventor： Edin Sarajlic

IPC: H01R43/00 ,  G01R3/00 ,  B81C1/00 ,  B01L3/00

CPC classification number: G01R3/00 ,  B01L3/502707 ,  B81B2201/057 ,  B81B2203/0118 ,  B81B2203/0338 ,  B81C1/00119 ,  B81C2201/0109 ,  Y10T29/49002

Abstract: The present invention relates to a method of manufacturing a probe comprising a cantilever with a conduit. According to the invention, an etchant window is provided in a layer covering an elongated sacrificial conduit core that is to form the conduit. This allows for an etching process where the elongated sacrificial conduit core is etched away before all material of a substrate is etched away, the remaining material of the substrate material making the probe stronger without being in the way during use of the probe.

Abstract translation: 本发明涉及一种制造探针的方法，该探针包括具有导管的悬臂。 根据本发明，在覆盖要形成导管的细长牺牲导管芯的层中提供蚀刻剂窗口。 这允许蚀刻工艺，其中在衬底的所有材料被蚀刻掉之前，细长的牺牲导管芯被蚀刻掉，使衬底材料的剩余材料在探针的使用期间不会妨碍探针。