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公开(公告)号：US20150377226A1
公开(公告)日：2015-12-31
申请号：US14767534
申请日：2014-01-28
Applicant: EDWARDS LIMITED
Inventor： Ian David Stones , Malcolm William Gray , Iain David Port
IPC: F04B37/14
Abstract: A vacuum pumping system comprises a plurality of vacuum pumping arrangements for evacuating an enclosure and an auxiliary vacuum chamber for evacuation by at least one first vacuum pumping arrangement. The vacuum pumping system has a first state for evacuating the enclosure and a second state for conserving power consumed by the system. In a first stage of the second state the first vacuum pumping arrangement is arranged to evacuate an exhaust of at least one second vacuum pumping arrangement and in a second stage the exhaust of the first pumping arrangement is arranged to be evacuated by the auxiliary vacuum chamber.
Abstract translation: 真空泵系统包括用于抽空外壳的多个真空泵送装置和用于通过至少一个第一真空泵送装置排空的辅助真空室。 真空泵系统具有用于抽空外壳的第一状态和用于节省由系统消耗的功率的第二状态。 在第二状态的第一阶段，第一真空泵送装置被布置成抽空至少一个第二真空泵送装置的排气，并且在第二阶段中，第一泵送装置的排气被布置成被辅助真空室排空。
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公开(公告)号：US20180372081A1
公开(公告)日：2018-12-27
申请号：US16117886
申请日：2018-08-30
Applicant: Edwards Limited
Inventor： Ian David Stones , Malcolm William Gray , Iain David Port
Abstract: A vacuum pumping system comprises a plurality of vacuum pumping arrangements for evacuating an enclosure and an auxiliary vacuum chamber for evacuation by at least one first vacuum pumping arrangement. The vacuum pumping system has a first state for evacuating the enclosure and a second state for conserving power consumed by the system. In a first stage of the second state the first vacuum pumping arrangement is arranged to evacuate an exhaust of at least one second vacuum pumping arrangement and in a second stage the exhaust of the first pumping arrangement is arranged to be evacuated by the auxiliary vacuum chamber.
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公开(公告)号：US10982662B2
公开(公告)日：2021-04-20
申请号：US16117886
申请日：2018-08-30
Applicant: Edwards Limited
Inventor： Ian David Stones , Malcolm William Gray , Iain David Port
Abstract: A vacuum pumping system comprises a plurality of vacuum pumping arrangements for evacuating an enclosure and an auxiliary vacuum chamber for evacuation by at least one first vacuum pumping arrangement. The vacuum pumping system has a first state for evacuating the enclosure and a second state for conserving power consumed by the system. In a first stage of the second state the first vacuum pumping arrangement is arranged to evacuate an exhaust of at least one second vacuum pumping arrangement and in a second stage the exhaust of the first pumping arrangement is arranged to be evacuated by the auxiliary vacuum chamber.
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公开(公告)号：US10082134B2
公开(公告)日：2018-09-25
申请号：US14767534
申请日：2014-01-28
Applicant: Edwards Limited
Inventor： Ian David Stones , Malcolm William Gray , Iain David Port
Abstract: A vacuum pumping system comprises a plurality of vacuum pumping arrangements for evacuating an enclosure and an auxiliary vacuum chamber for evacuation by at least one first vacuum pumping arrangement. The vacuum pumping system has a first state for evacuating the enclosure and a second state for conserving power consumed by the system. In a first stage of the second state the first vacuum pumping arrangement is arranged to evacuate an exhaust of at least one second vacuum pumping arrangement and in a second stage the exhaust of the first pumping arrangement is arranged to be evacuated by the auxiliary vacuum chamber.
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