公开(公告)号：US20210305002A1

公开(公告)日：2021-09-30

申请号：US17201629

申请日：2021-03-15

Applicant: Electronics and Telecommunications Research Institute

Inventor： Jae-Woo KIM ,  Yoon-Ho SONG ,  Eun Sol KO

IPC: H01J29/62 ,  H01J29/04 ,  H01J29/48

Abstract: Provided is a field emission device including a cathode electrode and an anode electrode, which are spaced apart from each other, an emitter disposed on the cathode electrode, a gate electrode disposed between the cathode electrode and the anode electrode and including a gate opening that overlaps the emitter, and a plurality of alignment electrodes disposed between the gate electrode and the cathode electrode. Here, the alignment electrodes surround a side surface of the emitter.