Cathode mechanism of electron gun, electron gun, and electron beam writing apparatus

    公开(公告)号:US11430628B1

    公开(公告)日:2022-08-30

    申请号:US17647198

    申请日:2022-01-06

    发明人: Ryoei Kobayashi

    IPC分类号: H01J29/45 H01J29/48 H01J29/51

    摘要: A cathode mechanism of an electron gun includes a crystal to emit a thermal electron from an end surface by being heated, a holding part to hold the crystal in a state where the end surface is exposed and at least a part of other surfaces of the crystal is covered, a first supporting post and a second supporting post each to support the holding part and extend while maintaining an unchanged sectional size, a first base part to fix the first supporting post, and a second base part to fix the second supporting post, wherein the holding part, the first supporting post, the second supporting post, the first base part, and the second base part are formed in an integrated structure made of the same material, and the crystal is heated by supplying a current to the integrated structure.

    CATHODE MECHANISM OF ELECTRON GUN, ELECTRON GUN, AND ELECTRON BEAM WRITING APPARATUS

    公开(公告)号:US20220270842A1

    公开(公告)日:2022-08-25

    申请号:US17647198

    申请日:2022-01-06

    发明人: Ryoei KOBAYASHI

    IPC分类号: H01J29/48 H01J29/51

    摘要: A cathode mechanism of an electron gun includes a crystal to emit a thermal electron from an end surface by being heated, a holding part to hold the crystal in a state where the end surface is exposed and at least a part of other surfaces of the crystal is covered, a first supporting post and a second supporting post each to support the holding part and extend while maintaining an unchanged sectional size, a first base part to fix the first supporting post, and a second base part to fix the second supporting post, wherein the holding part, the first supporting post, the second supporting post, the first base part, and the second base part are formed in an integrated structure made of the same material, and the crystal is heated by supplying a current to the integrated structure.

    Field emission device
    3.
    发明授权

    公开(公告)号:US11342153B2

    公开(公告)日:2022-05-24

    申请号:US17201629

    申请日:2021-03-15

    摘要: Provided is a field emission device including a cathode electrode and an anode electrode, which are spaced apart from each other, an emitter disposed on the cathode electrode, a gate electrode disposed between the cathode electrode and the anode electrode and including a gate opening that overlaps the emitter, and a plurality of alignment electrodes disposed between the gate electrode and the cathode electrode. Here, the alignment electrodes surround a side surface of the emitter.

    X-ray generation apparatus
    4.
    发明授权

    公开(公告)号:US11164713B2

    公开(公告)日:2021-11-02

    申请号:US16836187

    申请日:2020-03-31

    摘要: An X-ray generation apparatus includes an electron gun configured to emit an electron beam, a rotary anode unit having a target generating an X-ray by receiving the electron beam and configured to rotate the target, a magnetic lens having a coil configured to generate a magnetic force acting on the electron beam between the electron gun and the target, and a wall portion disposed between the target and the coil so as to face the target. The wall portion is formed with an electron passage hole through which the electron beam passes and a flow path configured to allow a coolant to flow.

    FIELD EMISSION DEVICE
    5.
    发明申请

    公开(公告)号:US20210305002A1

    公开(公告)日:2021-09-30

    申请号:US17201629

    申请日:2021-03-15

    IPC分类号: H01J29/62 H01J29/04 H01J29/48

    摘要: Provided is a field emission device including a cathode electrode and an anode electrode, which are spaced apart from each other, an emitter disposed on the cathode electrode, a gate electrode disposed between the cathode electrode and the anode electrode and including a gate opening that overlaps the emitter, and a plurality of alignment electrodes disposed between the gate electrode and the cathode electrode. Here, the alignment electrodes surround a side surface of the emitter.

    THRUSTER DEVICE
    6.
    发明申请
    THRUSTER DEVICE 审中-公开

    公开(公告)号:US20200332780A1

    公开(公告)日:2020-10-22

    申请号:US16518997

    申请日:2019-07-23

    IPC分类号: F03H1/00 H01J29/48

    摘要: The present disclosure provides a thruster device. The device includes a force-generating element mounted to a housing. The element is configured to generate a thrust force for propelling the housing. The element including a first electrode connected to a first input terminal of a power source. A second electrode is spaced apart by a predetermined distance from the first electrode and connected to a second input terminal of the power source. The second electrode includes a second longitudinal axis oriented parallelly to a first longitudinal axis. A dielectric medium is disposed between the electrodes. Upon receiving field emission condition, charged particles available at the first electrode accelerate towards the second electrode for generating a thrust force along a direction of movement of the charged particles. The thrust force is generated when the predetermined distance between the electrodes is shorter than a Rindler horizon defined by the charged particles during acceleration.

    Image intensifier sensor as well as an imaging device comprising such an image intensifier sensor

    公开(公告)号:US10790109B2

    公开(公告)日:2020-09-29

    申请号:US15506965

    申请日:2015-08-13

    发明人: Bjorn Pluis

    摘要: An image intensifier sensor for acquiring, amplifying and displaying images and including a vacuum envelope, the image intensifier sensor including a photocathode arranged for releasing photoelectrons into the vacuum envelope upon electromagnetic radiation acquired from the images which impinges the photocathode, an anode, spaced apart from and in facing relationship with the photocathode, arranged for receiving the photoelectrons and converting the photoelectrons for displaying the images on the basis thereof, and a power supply unit for providing power to the image intensifier sensor, wherein the image intensifier sensor further includes potting material, wherein the potting material comprises a foam compound.

    Multi-grid electron gun with single grid supply

    公开(公告)号:US10573483B2

    公开(公告)日:2020-02-25

    申请号:US15694657

    申请日:2017-09-01

    摘要: Some embodiments include a system, comprising: a high voltage enclosure; a cathode disposed in the high voltage enclosure; an anode disposed in the high voltage enclosure; a plurality of grids disposed in the high voltage enclosure between the cathode and the anode; a voltage source configured to generate a common grid voltage; and a voltage divider disposed in the high voltage enclosure, configured to generate a plurality of grid voltages based on the common grid voltage, and configured to apply at least two of the grid voltages to the grids.

    Electromagnetic interference containment for accelerator systems

    公开(公告)号:US10366859B2

    公开(公告)日:2019-07-30

    申请号:US15245551

    申请日:2016-08-24

    IPC分类号: H01J29/96 H01J29/00 H01J29/48

    摘要: An apparatus for attachment to a component of a microwave device, includes: a cage; a shield within the cage, wherein the shield is in a form of a container, at least a majority of the shield spaced away from an interior wall of the cage; and a connector at the cage, wherein the connector is configured to connect to a cable connection, and wherein the connector is electrically connected to two terminals within the shield. An apparatus for coupling to an input connection of an electron gun, the input connection having a heater terminal and a cathode terminal, the apparatus comprising: a connector having a first configured to attach to a cable, and a second end configured to connect to the input connection of the electron gun; and wherein the connector comprises an opening configured to receive the heater terminal of the input connection of the electron gun.