公开(公告)号：US11143416B2

公开(公告)日：2021-10-12

申请号：US14908206

申请日：2014-07-29

Applicant: Evatec Advanced Technologies AG

Inventor： Juergen Weichart ,  Rolf Bazlen

IPC: F24C15/24 ,  H01L21/67

Abstract: An electrical radiation heater arrangement for a vacuum enclosure includes at least two sets of linear heating sources, arranged in a corresponding number of concentric heating zones. The heating sources are arranged directly on the vacuum side of the vacuum enclosure and electrically connected to current rails arranged on the vacuum side with each of the current rails being connected to one electrical feedthrough from vacuum to ambient. Preferably, the heating sources are arranged in a polygon approaching a circle, essentially radially or a combination of both.

公开(公告)号：US20160169536A1

公开(公告)日：2016-06-16

申请号：US14908206

申请日：2014-07-29

Applicant: EVATEC ADVANCED TECHNOLOGIES AG

Inventor： Juergen Weichart ,  Rolf Bazlen

IPC: F24C15/24 ,  H01L21/67

CPC classification number: F24C15/24 ,  H01L21/67115

Abstract: An electrical radiation heater arrangement for a vacuum enclosure includes at least two sets of linear heating sources, arranged in a corresponding number of concentric heating zones. The heating sources are arranged directly on the vacuum side of the vacuum enclosure and electrically connected to current rails arranged on the vacuum side with each of the current rails being connected to one electrical feedthrough from vacuum to ambient. Preferably, the heating sources are arranged in a polygon approaching a circle, essentially radially or a combination of both.

Abstract translation: 用于真空外壳的电辐射加热器装置包括布置在相应数量的同心加热区域中的至少两组线性加热源。 加热源直接设置在真空外壳的真空侧，并电连接到设置在真空侧的电流轨，每个电流轨与真空至环境的一个电馈通连接。 优选地，加热源被布置在接近圆的多边形中，基本上是放射状的或两者的组合。