公开(公告)号：US20170170353A1

公开(公告)日：2017-06-15

申请号：US15373228

申请日：2016-12-08

Applicant: First Solar, Inc.

Inventor： Changming Jin ,  Sanghyun Lee ,  Jun-Ying Zhang

IPC: H01L31/073 ,  H01L31/0272 ,  H01L31/0264

CPC classification number: H01L31/073 ,  H01J2237/335 ,  H01L21/02422 ,  H01L21/02491 ,  H01L21/02551 ,  H01L21/02664 ,  H01L31/0264 ,  H01L31/0272 ,  H01L31/1868 ,  Y02E10/543 ,  Y02P70/521

Abstract: Disclosed are methods for the surface cleaning and passivation of PV absorbers, such as CdTe substrates usable in solar cells, and devices made by such methods. In some embodiments, the method involves an anode layer ion source (ALIS) plasma discharge process to clean and oxidize a CdTe surface to produce a thin oxide layer between the CdTe layer and subsequent back contact layer(s).

公开(公告)号：US10896991B2

公开(公告)日：2021-01-19

申请号：US16522980

申请日：2019-07-26

Applicant: First Solar, Inc.

Inventor： Changming Jin ,  Sanghyun Lee ,  Jun-Ying Zhang

IPC: H01L31/073 ,  H01L31/18 ,  H01L31/0264 ,  H01L31/0272 ,  H01L21/02

Abstract: Disclosed are methods for the surface cleaning and passivation of PV absorbers, such as CdTe substrates usable in solar cells, and devices made by such methods. In some embodiments, the method involves an anode layer ion source (ALIS) plasma discharge process to clean and oxidize a CdTe surface to produce a thin oxide layer between the CdTe layer and subsequent back contact layer(s).

公开(公告)号：US10367110B2

公开(公告)日：2019-07-30

申请号：US15373228

申请日：2016-12-08

Applicant: First Solar, Inc.

Inventor： Changming Jin ,  Sanghyun Lee ,  Jun-Ying Zhang

IPC: H01L31/18 ,  H01L31/073 ,  H01L31/0264 ,  H01L31/0272 ,  H01L21/02

Abstract: Disclosed are methods for the surface cleaning and passivation of PV absorbers, such as CdTe substrates usable in solar cells, and devices made by such methods. In some embodiments, the method involves an anode layer ion source (ALIS) plasma discharge process to clean and oxidize a CdTe surface to produce a thin oxide layer between the CdTe layer and subsequent back contact layer(s).