公开(公告)号：US11821912B2

公开(公告)日：2023-11-21

申请号：US17313789

申请日：2021-05-06

Applicant: FormFactor, Inc.

Inventor： Anthony James Lord ,  Gavin Neil Fisher ,  David Randle Hess

IPC: G01R31/311 ,  G01R31/319

CPC classification number: G01R31/311 ,  G01R31/31917

Abstract: Methods of producing augmented probe system images and associated probe systems. A method of producing an augmented probe system image includes recording a base probe system image, generating the augmented probe system image at least partially based on the base probe system image, and presenting the augmented probe system image. The augmented probe system image includes a representation of at least a portion of the probe system that is obscured in the base probe system image. In some examples, a probe system includes a chuck, a probe assembly, an imaging device, and a controller programmed to perform methods disclosed herein.

公开(公告)号：US11016121B2

公开(公告)日：2021-05-25

申请号：US16421173

申请日：2019-05-23

Applicant: FormFactor, Inc.

Inventor： Sia Choon Beng ,  David Randle Hess ,  Chunyi Yin Leong

IPC: G01R1/02 ,  G01R31/26 ,  G01R1/067 ,  G01R1/04

Abstract: Methods of controlling the operation of probe stations and probe stations that perform the methods. The methods including generating a test routine by constructing a substrate map, receiving a test subset input from a user, and updating the substrate map to incorporate information regarding which devices under test (DUTS) of a plurality of DUTs are in a test subset of a plurality of DUTs. The methods also include receiving a pre-test subset input from the user, wherein the pre-test subset is a subset of the test subset, and updating the substrate map to incorporate information which DUTs of the test subset are in the pre-test subset. The methods further include executing the test routine by moving a probe assembly to each DUT in the test subset, selectively performing a pre-test routine on each DUT that is in the pre-test subset, and electrically testing each DUT in the test subset.

公开(公告)号：US20210373073A1

公开(公告)日：2021-12-02

申请号：US17313789

申请日：2021-05-06

Applicant: FormFactor, Inc.

Inventor： Anthony James Lord ,  Gavin Neil Fisher ,  David Randle Hess

IPC: G01R31/311 ,  G01R31/319

Abstract: Methods of producing augmented probe system images and associated probe systems. A method of producing an augmented probe system image includes recording a base probe system image, generating the augmented probe system image at least partially based on the base probe system image, and presenting the augmented probe system image. The augmented probe system image includes a representation of at least a portion of the probe system that is obscured in the base probe system image. In some examples, a probe system includes a chuck, a probe assembly, an imaging device, and a controller programmed to perform methods disclosed herein.