公开(公告)号：US11016121B2

公开(公告)日：2021-05-25

申请号：US16421173

申请日：2019-05-23

Applicant: FormFactor, Inc.

Inventor： Sia Choon Beng ,  David Randle Hess ,  Chunyi Yin Leong

IPC: G01R1/02 ,  G01R31/26 ,  G01R1/067 ,  G01R1/04

Abstract: Methods of controlling the operation of probe stations and probe stations that perform the methods. The methods including generating a test routine by constructing a substrate map, receiving a test subset input from a user, and updating the substrate map to incorporate information regarding which devices under test (DUTS) of a plurality of DUTs are in a test subset of a plurality of DUTs. The methods also include receiving a pre-test subset input from the user, wherein the pre-test subset is a subset of the test subset, and updating the substrate map to incorporate information which DUTs of the test subset are in the pre-test subset. The methods further include executing the test routine by moving a probe assembly to each DUT in the test subset, selectively performing a pre-test routine on each DUT that is in the pre-test subset, and electrically testing each DUT in the test subset.